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POSITIONAL CHANGE MEASUREMENT DEVICE, POSITIONAL CHANGE MEASUREMENT METHOD, AND IMAGE FORMING APPARATUS

  • US 20140268180A1
  • Filed: 03/13/2014
  • Published: 09/18/2014
  • Est. Priority Date: 03/15/2013
  • Status: Active Grant
First Claim
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1. A positional change measurement device comprising:

  • a light source;

    an illuminating optical system configured to guide light from the light source to a measured surface;

    an imaging optical system;

    an image pickup device configured to acquire a speckle pattern by receiving reflection light from the measured surface via the imaging optical system; and

    detected-length compensation means for compensating for fluctuations in a detected length which are caused by temperature fluctuations, whereinpositional change of the measured surface is measured based on a result of cross-correlation computation performed on a plurality of speckle patterns acquired at predetermined time intervals.

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