POSITIONAL CHANGE MEASUREMENT DEVICE, POSITIONAL CHANGE MEASUREMENT METHOD, AND IMAGE FORMING APPARATUS
First Claim
1. A positional change measurement device comprising:
- a light source;
an illuminating optical system configured to guide light from the light source to a measured surface;
an imaging optical system;
an image pickup device configured to acquire a speckle pattern by receiving reflection light from the measured surface via the imaging optical system; and
detected-length compensation means for compensating for fluctuations in a detected length which are caused by temperature fluctuations, whereinpositional change of the measured surface is measured based on a result of cross-correlation computation performed on a plurality of speckle patterns acquired at predetermined time intervals.
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Abstract
An objective is to achieve a positional change measurement device which measures positional change of a dynamic measured surface by using speckle patterns while easily reducing influence of fluctuations in a measurement environment temperature. Provided is a positional change measurement device including: a light source; an illuminating optical system configured to guide light from the light source to a measured surface; an imaging optical system; an image pickup device configured to acquire a speckle pattern by receiving reflection light from the measured surface via the imaging optical system; and detected-length compensation means for compensating for fluctuations in a detected length caused by temperature fluctuations. Positional change of the measured surface is measured based on a result of cross-correlation computation performed on multiple speckle patterns acquired at predetermined time intervals.
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Citations
19 Claims
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1. A positional change measurement device comprising:
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a light source; an illuminating optical system configured to guide light from the light source to a measured surface; an imaging optical system; an image pickup device configured to acquire a speckle pattern by receiving reflection light from the measured surface via the imaging optical system; and detected-length compensation means for compensating for fluctuations in a detected length which are caused by temperature fluctuations, wherein positional change of the measured surface is measured based on a result of cross-correlation computation performed on a plurality of speckle patterns acquired at predetermined time intervals. - View Dependent Claims (2, 3, 4, 5, 6, 7)
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8. A positional change measurement device comprising:
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a light source; an illuminating optical system configured to guide light from the light source to a measured surface; an imaging optical system; and an image pickup device configured to acquire a speckle pattern by receiving reflection light from the measured surface via the imaging optical system, wherein positional change of the measured surface is measured based on a result of cross-correlation computation performed on a plurality of speckle patterns acquired at predetermined time intervals, the imaging optical system includes, from a measured-surface side, a first group of a positive power, an aperture stop, and a second group of a positive power, the aperture stop is provided at a position of an image-side focal plane of the first group and of an object-side focal plane of the second group, a light-receiving surface of the image pickup device is placed at a Gaussian plane of the measured surface formed by the imaging optical system, and the positional change measurement device satisfies; a condition (1) D/Db=0, where Db is a distance between a boiling plane of the measured surface and the Gaussian plane of the measured surface formed by the imaging optical system, and D is an interspace between the Gaussian plane and the light-receiving surface of the image pickup device. - View Dependent Claims (9, 10, 11, 12, 13, 14, 15, 16, 17, 18, 19)
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Specification