OPTICAL SCANNER, IMAGE DISPLAY APPARATUS, AND HEAD MOUNTED DISPLAY

• US 20140268266A1
• Filed: 03/17/2014
• Published: 09/18/2014
• Est. Priority Date: 03/18/2013
• Status: Abandoned Application

• Current Assignee: Seiko Epson Corporation (Seiko Group)
• Original Assignee: Seiko Epson Corporation (Seiko Group)
• Inventors: Shimizu, Takeshi
• Application Number:
  US14/215,607
• Publication Number:
  US 20140268266A1
• Time in Patent Office: Days
• US Class Current: 359/200.1
• CPC Class Codes: G02B 26/0833 the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD G02B26/0825 takes precedence; micromechanical devices in general B81B
• CPC Class Codes: G02B 26/085 the reflecting means being moved or deformed by electromagnetic means
• CPC Class Codes: G02B 26/101 with both horizontal and vertical deflecting means, e.g. raster or XY scanners colour television using laser beams scanning a display screen H04N9/3129

Abstract

An optical scanner includes a movable section, a frame body section, a first shaft section configured to connect the movable section and the frame body section, a fixed section, a second shaft section configured to connect the frame body section and the fixed section, a first distortion detecting element and a second distortion detecting element arranged at an end on the frame body section side of the second shaft section or in any one of the movable section, the frame body section, and the first shaft section, a first signal processing section configured to receive a detection signal of the first distortion detecting element and output a signal based on bending deformation of the second shaft section, and a second signal processing section configured to receive a detection signal of the second distortion detecting element and output a signal based on torsional deformation of the second shaft section.

Claims

1. An optical scanner comprising:

a movable section including a light reflecting section having light reflectivity and swingable around a first axis;

a frame body section swingable around a second axis crossing the first axis;

a first shaft section configured to connect the movable section and the frame body section;

a fixed section;

a second shaft section configured to connect the frame body section and the fixed section;

a first distortion detecting element arranged at an end on the frame body section side of the second shaft section or in any one of the movable section, the frame body section, and the first shaft section;

a second distortion detecting element arranged at the end on the frame body section side of the second shaft section or in any one of the movable section, the frame body section, and the first shaft section;

a first signal processing section configured to receive a detection signal of the first distortion detecting element and output a signal based on bending deformation of the second shaft section; and

a second signal processing section configured to receive a detection signal of the second distortion detecting element and output a signal based on torsional deformation of the second shaft section.

2. The optical scanner according to claim 1, wherein the first distortion detecting element is arranged at the end on the frame body section side of the second shaft section and detects deformation of the second shaft section.

3. The optical scanner according to claim 2, wherein the first distortion detecting element includes:

a piezo-resistance region formed in a longitudinal shape extending in a direction along a longitudinal direction of the second shaft section; and

a pair of terminals arranged side by side in the direction along the longitudinal direction of the second shaft section on the piezo-resistance region.

4. The optical scanner according to claim 1, wherein the optical scanner detects behavior around the first axis of the movable section on the basis of the signal output from the first signal processing section.

5. The optical scanner according to claim 4, wherein the optical scanner estimates, using an observer, the behavior around the first axis of the movable section on the basis of the signal output from the first signal processing section.

6. The optical scanner according to claim 4, wherein the optical scanner estimates the behavior around the first axis of the movable section on the basis of the signal output from the first signal processing section using a ratio of amplitude in a resonance frequency concerning swinging around the first axis of the movable section and amplitude in a resonance frequency concerning swinging around the first axis of the frame body section.

7. The optical scanner according to claim 1, wherein the second distortion detecting element is arranged at the end on the frame body section side of the second shaft section and detects deformation of the second shaft section.

8. The optical scanner according to claim 7, wherein the optical scanner detects the behavior around the second axis of the movable section on the basis of the signal output from the second signal processing section.

12. An image display apparatus comprising:

the optical scanner according to claim 1; and

a light source configured to emit light, wherein

the image display apparatus reflects, with the light reflecting section, the light emitted from the light source and displays an image.

13. An image display apparatus comprising:

the optical scanner according to claim 2; and

a light source configured to emit light, wherein

the image display apparatus reflects, with the light reflecting section, the light emitted from the light source and displays an image.

14. An image display apparatus comprising:

the optical scanner according to claim 3; and

a light source configured to emit light, wherein

the image display apparatus reflects, with the light reflecting section, the light emitted from the light source and displays an image.

15. An image display apparatus comprising:

the optical scanner according to claim 4; and

a light source configured to emit light, wherein

the image display apparatus reflects, with the light reflecting section, the light emitted from the light source and displays an image.

17. A head mounted display comprising:

the optical scanner according to claim 1; and

a light source configured to emit light, wherein

the head mounted display reflects, with the light reflecting section, the light emitted from the light source and displays an image.

18. A head mounted display comprising:

the optical scanner according to claim 2; and

a light source configured to emit light, wherein

the head mounted display reflects, with the light reflecting section, the light emitted from the light source and displays an image.

19. A head mounted display comprising:

the optical scanner according to claim 3; and

a light source configured to emit light, wherein

the head mounted display reflects, with the light reflecting section, the light emitted from the light source and displays an image.

9. An optical scanner comprising:

a movable section including a light reflecting section having light reflectivity and swingable around a first axis;

a frame body section swingable around a second axis crossing the first axis;

a first shaft section configured to connect the movable section and the frame body section;

a fixed section;

a second shaft section configured to connect the frame body section and the fixed section;

a distortion detecting element arranged at an end on the frame body section side of the second shaft section and configured to detect deformation of the second shaft section;

a first signal processing section configured to receive a detection signal of the distortion detecting element and output a signal based on bending deformation of the second shaft section; and

a second signal processing section configured to receive the detection signal of the distortion detecting element and output a signal based on torsional deformation of the second shaft section.

10. The optical scanner according to claim 9, wherein the distortion detecting element includes:

a piezo-resistance region; and

a pair of terminals arranged side by side in a direction inclining with respect to a longitudinal direction of the second shaft section on the piezo-resistance region.

11. The optical scanner according to claim 10, wherein

a pair of the second shaft sections are provided across the frame body section, and

the distortion detecting element is arranged in each of the pair of second shaft sections.

16. An image display apparatus comprising:

the optical scanner according to claim 9; and

a light source configured to emit light, wherein

the image display apparatus reflects, with the light reflecting section, the light emitted from the light source and displays an image.

20. A head mounted display comprising:

the optical scanner according to claim 9; and

a light source configured to emit light, wherein

the head mounted display reflects, with the light reflecting section, the light emitted from the light source and displays an image.