ELECTROSTATICALLY STEERABLE ACTUATOR
First Claim
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1. An electrostatically steerable actuator, the actuator comprising:
- a gimbaled platform, a central portion of a rear side of the platform extending outward from the platform, a diameter of the central portion being substantially smaller than a corresponding diameter of the platform; and
an array of electrodes facing the rear side of the platform to provide an adjustable electrostatic field for tilting the platform.
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Abstract
An electrostatically steerable actuator includes a gimbaled platform. A central portion of a rear side of the platform extends outward from the platform. A diameter of the central portion is substantially smaller than a corresponding diameter of the platform. An array of electrodes faces the rear side of the platform to provide an adjustable electrostatic field for tilting the platform.
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Citations
18 Claims
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1. An electrostatically steerable actuator, the actuator comprising:
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a gimbaled platform, a central portion of a rear side of the platform extending outward from the platform, a diameter of the central portion being substantially smaller than a corresponding diameter of the platform; and an array of electrodes facing the rear side of the platform to provide an adjustable electrostatic field for tilting the platform. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16, 17)
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18. The actuator of claim 18, wherein the material comprises silicon.
Specification