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MEMS Acoustic Transducer, MEMS Microphone, MEMS Microspeaker, Array of Speakers and Method for Manufacturing an Acoustic Transducer

  • US 20140270271A1
  • Filed: 03/14/2013
  • Published: 09/18/2014
  • Est. Priority Date: 03/14/2013
  • Status: Active Grant
First Claim
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1. A MEMS acoustic transducer, comprising:

  • a substrate having a cavity therethrough;

    a conductive back plate unit including a plurality of conductive perforated back plate portions which extend over the substrate cavity;

    a dielectric spacer arranged on the back plate unit between adjacent conductive perforated back plate portions; and

    one or more graphene membranes supported by the dielectric spacer and extending over the conductive perforated back plate portion.

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