MULTI-STEP BAKE APPARATUS AND METHOD FOR DIRECTED SELF-ASSEMBLY LITHOGRAPHY CONTROL
First Claim
1. A method of forming a patterned substrate, comprising:
- casting a layer of a block copolymer on a substrate to form a layered substrate, wherein the block copolymer has an intrinsic glass transition temperature Tg;
heating the layered substrate at an annealing temperature in a first atmosphere for a first time period, wherein the annealing temperature is greater than about 50°
C. above the intrinsic glass transition temperature Tg of the block copolymer;
thermally quenching the layered substrate to a quenching temperature at a rate of greater than about 50°
C./minute in a second atmosphere, wherein the quenching temperature is lower than the intrinsic glass transition temperature Tg; and
controlling an oxygen content in the first and second atmospheres to a level equal to or less than about 50 ppm to maintain the annealing temperature and the quenching temperature below a thermal degradation temperature Td of the block copolymer.
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Abstract
A method of forming a patterned substrate includes casting a layer of a block copolymer having an intrinsic glass transition temperature Tg, on a substrate to form a layered substrate. The method also includes heating the layered substrate at an annealing temperature, which is greater than about 50° C. above the intrinsic glass transition temperature Tg of the block copolymer, in a first atmosphere. The method further includes thermally quenching the layered substrate to a quenching temperature lower than the intrinsic glass transition temperature Tg, at a rate of greater than about 50° C./minute in a second atmosphere. The method further includes controlling an oxygen content in the first and second atmospheres to a level equal to or less than about 50 ppm to maintain the annealing and quenching temperatures below a thermal degradation temperature Td of the block copolymer.
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Citations
20 Claims
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1. A method of forming a patterned substrate, comprising:
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casting a layer of a block copolymer on a substrate to form a layered substrate, wherein the block copolymer has an intrinsic glass transition temperature Tg; heating the layered substrate at an annealing temperature in a first atmosphere for a first time period, wherein the annealing temperature is greater than about 50°
C. above the intrinsic glass transition temperature Tg of the block copolymer;thermally quenching the layered substrate to a quenching temperature at a rate of greater than about 50°
C./minute in a second atmosphere, wherein the quenching temperature is lower than the intrinsic glass transition temperature Tg; andcontrolling an oxygen content in the first and second atmospheres to a level equal to or less than about 50 ppm to maintain the annealing temperature and the quenching temperature below a thermal degradation temperature Td of the block copolymer. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16, 17, 18, 19, 20)
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Specification