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MULTI-STEP BAKE APPARATUS AND METHOD FOR DIRECTED SELF-ASSEMBLY LITHOGRAPHY CONTROL

  • US 20140273523A1
  • Filed: 03/10/2014
  • Published: 09/18/2014
  • Est. Priority Date: 03/15/2013
  • Status: Active Grant
First Claim
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1. A method of forming a patterned substrate, comprising:

  • casting a layer of a block copolymer on a substrate to form a layered substrate, wherein the block copolymer has an intrinsic glass transition temperature Tg;

    heating the layered substrate at an annealing temperature in a first atmosphere for a first time period, wherein the annealing temperature is greater than about 50°

    C. above the intrinsic glass transition temperature Tg of the block copolymer;

    thermally quenching the layered substrate to a quenching temperature at a rate of greater than about 50°

    C./minute in a second atmosphere, wherein the quenching temperature is lower than the intrinsic glass transition temperature Tg; and

    controlling an oxygen content in the first and second atmospheres to a level equal to or less than about 50 ppm to maintain the annealing temperature and the quenching temperature below a thermal degradation temperature Td of the block copolymer.

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