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GYROSCOPE SENSORS

  • US 20140283369A1
  • Filed: 06/10/2014
  • Published: 09/25/2014
  • Est. Priority Date: 01/12/2009
  • Status: Active Grant
First Claim
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1. A method of forming a structure for a gyroscope sensor, the method comprising:

  • forming a first dielectric over a substrate;

    forming a material layer over the dielectric;

    removing a first portion of the material layer to form a recess;

    removing a second portion of the material layer to define a first channel between a gyro disk and a frame;

    forming a second channel in the substrate corresponding to the first channel; and

    removing a portion of the first dielectric to form a second dielectric between the gyro disk and the substrate.

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