Micromechanical Element, Component Having a Micromechanical Element, and Method for Producing a Component
First Claim
1. A micromechanical element comprising first and second individual sensor elements, wherein the first physical measurement variable can be measured with the first individual sensor element and a second physical measurement variable can be measured with the second individual sensor element.
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Accused Products
Abstract
A micromechanical element (123a) having a plurality of individual sensor elements (1′a, 2′a, 3′a, 23a), wherein a first physical measurement variable can be measured with a first individual sensor element (1′a, 2′a, 3′a, 23a) and a second physical measurement variable can be measured with a second individual sensor element (1′a, 2′a, 3′a, 23a). A component is provided having at least one control electronics unit (1′b, 2′b, 3′b) which can be connected electrically to the micromechanical element (123a); wherein the micromechanical element (123a) and the control electronics unit (1′b, 2′b, 3′b) are arranged in a common housing (123c). A method for producing the component is further described.
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Citations
18 Claims
- 1. A micromechanical element comprising first and second individual sensor elements, wherein the first physical measurement variable can be measured with the first individual sensor element and a second physical measurement variable can be measured with the second individual sensor element.
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6. A component for measuring at least two physical measurement variables comprising:
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a micromechanical element having first and second individual sensor elements, wherein a first physical measurement variable can be measured with the first individual sensor element and the second physical measurement variable can be measured with the second individual sensor element; at least one control electronics unit adapted to be connected electrically to the micromechanical element; and wherein the micromechanical element and the control electronics unit are arranged in a common housing. - View Dependent Claims (7, 8, 9, 11, 12, 13, 14)
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10. A method for manufacturing a component comprising:
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making available providing a component having a micromechanical element (123a) having a plurality of first and second individual sensor elements, wherein a first physical measurement variable can be measured with the first individual sensor element and a second physical measurement variable can be measured with the second individual sensor element; providing at least one control electronics unit; electrically connecting the micromechanical element to the control electronics unit; and arranging the micromechanical element and the control electronics unit in a common housing. - View Dependent Claims (15, 16, 17, 18)
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Specification