Micromechanical Element, Component Having a Micromechanical Element, and Method for Producing a Component

• US 20140283603A1
• Filed: 11/02/2012
• Published: 09/25/2014
• Est. Priority Date: 11/03/2011
• Status: Abandoned Application

• Current Assignee: Continental Teves AG & Co. OHG (Continental AG)
• Original Assignee: Continental Teves AG & Co. OHG (Continental AG)
• Inventors: Gnthner, Stefan, Schmid, Bernhard
• Application Number:
  US14/355,428
• Publication Number:
  US 20140283603A1
• Time in Patent Office: Days
• US Class Current: 73/514.02
• CPC Class Codes: B81B 2201/0235 Accelerometers
• CPC Class Codes: B81B 2201/0242 Gyroscopes
• CPC Class Codes: B81B 2201/0264 Pressure sensors
• CPC Class Codes: B81B 2201/0278 Temperature sensors
• CPC Class Codes: B81B 7/02 containing distinct electrical or optical devices of particular relevance for their function, e.g. microelectro-mechanical systems [MEMS] B81B7/04 takes precedence
• CPC Class Codes: B81C 1/0023 Packaging together an electronic processing unit die and a micromechanical structure die MEMS packages B81B7/0032; MEMS packaging processes B81C1/00261
• CPC Class Codes: G01P 15/0888 for indicating angular acceleration
• CPC Class Codes: Y10T 29/49002 Electrical device making

Abstract

A micromechanical element (123a) having a plurality of individual sensor elements (1′a, 2′a, 3′a, 23a), wherein a first physical measurement variable can be measured with a first individual sensor element (1′a, 2′a, 3′a, 23a) and a second physical measurement variable can be measured with a second individual sensor element (1′a, 2′a, 3′a, 23a). A component is provided having at least one control electronics unit (1′b, 2′b, 3′b) which can be connected electrically to the micromechanical element (123a); wherein the micromechanical element (123a) and the control electronics unit (1′b, 2′b, 3′b) are arranged in a common housing (123c). A method for producing the component is further described.

Claims

1. A micromechanical element comprising first and second individual sensor elements, wherein the first physical measurement variable can be measured with the first individual sensor element and a second physical measurement variable can be measured with the second individual sensor element.

2. The micromechanical element as claimed in claim 1, further comprising wherein the first physical measurement variable and the second physical measurement variable differ from one another.

3. The micromechanical element as claimed in claim 1, further comprising wherein the first and the second physical measurement is at least one of a group of measurement variables composed of acceleration, velocity, rotational rate, pressure, temperature, and angle.

4. The micromechanical element as claimed in claim 1, further comprising wherein the first individual sensor element is arranged in a first region of the micromechanical element, and the second individual sensor element is arranged in a second region of the micromechanical element, wherein the first region and the second region are separated from one another hermetically.

5. The micromechanical element as claimed in claim 4, further comprising wherein the first region has a first pressure and the second region has a second pressure, and wherein the first pressure and the second pressure are different.

6. A component for measuring at least two physical measurement variables comprising:

a micromechanical element having first and second individual sensor elements, wherein a first physical measurement variable can be measured with the first individual sensor element and the second physical measurement variable can be measured with the second individual sensor element;

at least one control electronics unit adapted to be connected electrically to the micromechanical element; and

wherein the micromechanical element and the control electronics unit are arranged in a common housing.

7. The component as claimed in claim 6, further comprising wherein at least one of the first and the second individual sensor elements is connected electrically to the control electronics unit inside the housing via a first connection geometry.

8. The component as claimed in claim 7, further comprising wherein the control electronics unit has a second connection geometry which is connected electrically to a third connection geometry of the component.

9. The component as claimed in claim 6, further comprising wherein the micromechanical element is arranged geometrically centrally between a first control electronics unit and a second control electronics unit.

11. The component as claimed in claim 6, further comprising wherein the first physical measurement variable and the second physical measurement variable differ from one another.

12. The component as claimed in claim 6, further comprising wherein at least one of the first and the second physical measurement variables is from the group of measurement variables composed of acceleration, velocity, rotational rate, pressure, temperature, and angle.

13. The component as claimed in claim 6 further comprising wherein the first individual sensor element is arranged in a first region of the micromechanical element and the second individual sensor element is arranged in a second region of the micromechanical element, wherein the first region and the second region are separated from one another hermetically.

14. The component as claimed in claim 13, further comprising wherein the first region has a first pressure and the second region has a second pressure, and wherein the first pressure and the second pressure are different.

10. A method for manufacturing a component comprising:

making available providing a component having a micromechanical element (123a) having a plurality of first and second individual sensor elements, wherein a first physical measurement variable can be measured with the first individual sensor element and a second physical measurement variable can be measured with the second individual sensor element;

providing at least one control electronics unit;

electrically connecting the micromechanical element to the control electronics unit; and

arranging the micromechanical element and the control electronics unit in a common housing.

15. The method of manufacturing a component as claimed in claim 10, further comprising wherein the first physical measurement variable and the second physical measurement variable differ from one another.

16. The method of manufacturing a component as claimed in claim 10, further comprising wherein at least one of the first and the second physical measurement variables is from the group of measurement variables composed of acceleration, velocity, rotational rate, pressure, temperature, and angle.

17. The method of manufacturing a component as claimed in claim 10 further comprising arranging the first individual sensor element in a first region of the micromechanical element and arranging the second individual sensor element in a second region of the micromechanical and separating the first region and the second region from one another hermetically.

18. The method of manufacturing a component as claimed in claim 17, further comprising providing the first region with a first pressure and providing the second region with a second pressure, and wherein the first pressure and the second pressure are different.