REFRIGERATOR AND COLD TRAP

• US 20140290282A1
• Filed: 05/16/2014
• Published: 10/02/2014
• Est. Priority Date: 05/11/2012
• Status: Active Grant

• Current Assignee: Canon Anelva Corporation (Canon Inc.)
• Original Assignee: Canon Anelva Corporation (Canon Inc.)
• Inventors: KUWAJIMA, Atsuhiro, Kudo, Kenji, Takano, Daisaku
• Granted Patent: US 9,421,478 B2
• Time in Patent Office: Days
• US Class Current: 62/55.5
• CPC Class Codes: B01D 8/00 Cold traps; Cold baffles pumps for evacuating by condensing or freezing F04B37/08
• CPC Class Codes: F25B 2500/13 Vibrations
• CPC Class Codes: F25B 2600/0253 with variable speed
• CPC Class Codes: F25B 9/14 characterised by the cycle used, e.g. Stirling cycle
• CPC Class Codes: Y02B 30/70 Efficient control or regulation technologies, e.g. for control of refrigerant flow, motor or heating

Abstract

This invention provides a cold trap using a Stirling refrigerator. A refrigerator includes a drive piston configured to drive a free piston so as to reciprocally move a working medium between a heat dissipation portion and a heat absorption portion, a vibration sensor configured to measure a vibration of a case, a dynamic vibration absorber configured to reduce the vibration of the case when the drive piston is driven, and a frequency adjustment device configured to adjust a driving frequency to reduce the vibration of the case when the drive piston is driven in a state in which the case is connected to a vacuum device.

Claims

1. A cold trap including a refrigerator, a trap vessel arranged between the refrigerator and a vacuum vessel, and a cold panel arranged in the trap vessel and cooled by the refrigerator to trap gas molecules, the cold trap comprising a vibration sensor configured to detect a vibration in the cold trap,

the refrigerator comprising:

a case;

a piston capable of reciprocally moving in the case so as to compress and expand a working medium;

a dynamic vibration absorber attached outside the case and configured to reduce the vibration when the piston is driven; and

a driving frequency adjustment unit configured to adjust a driving frequency of the piston to increase a vibration reduction effect of the dynamic vibration absorber based on a signal from the vibration sensor.

2. The cold trap according to claim 1, wherein

the dynamic vibration absorber comprises a weight, and an elastic member having one end connected to the case and the other end connected to the weight, and

the driving frequency adjustment unit searches for the driving frequency of the piston at which the vibration is minimized while changing the driving frequency.

3. The cold trap according to claim 1, wherein the refrigerator further comprises a second piston configured to reciprocally move in the case while having a predetermined phase difference with respect to the piston and arranged between a space where the working medium is compressed and a space where the working medium is expanded.

4. The cold trap according to claim 1, wherein the driving frequency adjustment unit comprises:

a bandpass filter configured to process the signal from the vibration sensor;

an arithmetic unit configured to output a control signal decided to make the vibration small based on the signal processed by the bandpass filter; and

a driving unit configured to drive the piston at the driving frequency corresponding to the control signal from the arithmetic unit.

5. The cold trap according to claim 4, wherein the bandpass filter has a variable center frequency, and the center frequency is adjusted based on the control signal.

6. (canceled)