ILLUMINATION OPTICAL DEVICE, OPTICAL UNIT, ILLUMINATION METHOD, AND EXPOSURE METHOD AND DEVICE
First Claim
1. An illumination optical apparatus for illuminating an illumination target surface with light supplied from a light source, the illumination optical apparatus comprising:
- a separating optical system which separates the light supplied from the light source, into a first beam and a second beam in respective polarization states different from each other;
a varying optical system which is arranged in an optical path of at least one of the first beam and the second beam and which varies a phase difference distribution between the first beam and the second beam; and
a combining optical system which combines the first beam and the second beam between which the phase difference distribution has been varied.
1 Assignment
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Accused Products
Abstract
An illumination device for illuminating a reticle surface as an illumination target surface with illumination light supplied from a light source is provided with a first polarization beam splitter for separating the illumination light into a first beam and a second beam with respective polarization directions orthogonal to each other; a deformable mirror which is arranged in an optical path of the second beam and a shape of a reflecting surface of which is variable for changing a phase difference distribution between the first beam and the second beam; and a second polarization beam splitter for combining the first beam and the second beam between which the phase difference distribution has been established. The illumination target surface can be illuminated with light having a distribution of various polarization states.
14 Citations
40 Claims
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1. An illumination optical apparatus for illuminating an illumination target surface with light supplied from a light source, the illumination optical apparatus comprising:
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a separating optical system which separates the light supplied from the light source, into a first beam and a second beam in respective polarization states different from each other; a varying optical system which is arranged in an optical path of at least one of the first beam and the second beam and which varies a phase difference distribution between the first beam and the second beam; and a combining optical system which combines the first beam and the second beam between which the phase difference distribution has been varied. - View Dependent Claims (2, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16, 17)
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3. An illumination optical apparatus for illuminating an illumination target surface with light supplied from a light source, the illumination optical apparatus comprising:
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a separating optical system which separates the light supplied from the light source, into a first beam and a second beam in respective polarization states different from each other; a varying optical system which is arranged in an optical path of at least one of the first beam and the second beam and which varies a phase difference distribution between the first beam and the second beam; a combining optical system which combines the first beam and the second beam the phase difference distribution between which has been varied; and a polarization state changing element which is arranged in an optical path of a compound beam obtained by the combining optical system and which changes a polarization state of the compound beam. - View Dependent Claims (25, 26, 27, 28, 29, 30, 31, 32, 33, 34, 35, 36, 37, 38)
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18. An optical unit for changing a polarization state of light supplied from a light source, the optical unit comprising:
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a separating optical system which separates the light supplied from the light source, into a first beam and a second beam in respective polarization states different from each other; a varying optical system which is arranged in an optical path of at least one of the first beam and the second beam and which varies a phase difference distribution between the first beam and the second beam; a combining optical system which combines the first beam and the second beam between which the phase difference distribution has been varied; and a polarization state changing element which is arranged in an optical path of a compound beam obtained by the combining optical system and which changes a polarization state of the compound beam. - View Dependent Claims (19)
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20. An illumination method for illuminating an illumination target surface with light supplied from a light source, the illumination method comprising:
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separating the light supplied from the light source, into a first beam and a second beam in respective polarization states different from each other; establishing a variable phase difference distribution between the first beam and the second beam; and combining the first beam and the second beam the variable phase difference distribution between which has been established. - View Dependent Claims (21, 23, 24)
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22. An illumination method for illuminating an illumination target surface with light supplied from a light source, the illumination method comprising:
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separating the light supplied from the light source, into a first beam and a second beam in respective polarization states different from each other; varying a phase difference distribution between the first beam and the second beam; combining the first beam and the second beam between which the phase difference distribution has been varied; and guiding a compound beam obtained by a combining optical system, through a polarization state changing element. - View Dependent Claims (39, 40)
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Specification