Removable compartments for workpiece stocker

• US 20140294544A1
• Filed: 06/16/2014
• Published: 10/02/2014
• Est. Priority Date: 11/15/2006
• Status: Active Grant

• Current Assignee: Dynamic Micro Systems Semiconductor Equipment (Azenta, Inc.)
• Original Assignee: Dynamic Micro Systems Semiconductor Equipment (Azenta, Inc.)
• Inventors: Rebstock, Lutz
• Granted Patent: US 10,672,633 B2
• Time in Patent Office: Days
• US Class Current: 414/269
• CPC Class Codes: H01L 21/67201 characterized by the construction of the load-lock chamber
• CPC Class Codes: H01L 21/67769 Storage means
• CPC Class Codes: H01L 21/67775 Docking arrangements
• CPC Class Codes: H01L 21/67778 involving loading and unloading of wafers

Abstract

The present invention discloses apparatuses and method for configuring a compartmentable equipment to accommodate emergency responses. An exemplary equipment comprises a plurality of removable compartments for storing workpieces so that in emergency events, such as power failure or equipment failure, the workpieces can be removed from the equipment for continuing processing without disrupting the flow of the fabrication facility. The compartmentable equipment can comprise emergency access ports, including mating interface to a portable workpiece removal equipment to allow accessing the individual compartments without compromising the quality, defects and yield of the workpieces stored in the stocker.

Claims

1. A workpiece stocker comprising:

a chamber for storing a plurality of workpieces;

a robotic mechanism for transferring the workpieces from the chamber to an IO station;

an emergency access port for accessing the workpiece in the event of a failure of the stocker,

wherein the emergency access port comprises mating interface,

wherein the mating interface is configured to be mated to an enclosure,

wherein the enclosure is configured to link to the workpiece stocker to accept workpieces removed from the workpiece stocker without exposing other workpieces in the workpiece stocker to outside ambient.

2. A workpiece stocker as in claim 1 wherein the enclosure comprises a portable clean room for linking with the workpiece stocker.

3. A workpiece stocker as in claim 1 wherein the enclosure comprises a load lock for the emergency access port.

4. A workpiece stocker as in claim 1 wherein the enclosure is configured for an operator to stay outside the enclosure while handling the workpieces.

5. A workpiece stocker as in claim 1 wherein the enclosure comprises a portable glove box for accessing the workpieces.

6. A workpiece stocker as in claim 1 wherein the enclosure is configured for an operator to enter the workpiece stocker through the emergency access port to handle the workpieces.

7. A workpiece stocker as in claim 1 wherein the workpieces are stored in carrier boxes in the workpiece stocker.

8. A workpiece stocker as in claim 1 wherein the workpieces are stored bare in the workpiece stocker.

9. A workpiece stocker as in claim 1 wherein the enclosure comprises container boxes for allowing storing the workpieces before removing from the workpiece stocker.

10. A workpiece stocker comprising:

a chamber for storing a plurality of workpieces;

a robotic mechanism for transferring the workpieces from the chamber to an IO station;

an emergency access port,

wherein the emergency access port is configured for accessing the workpiece in the event of a failure of the stocker,

wherein the emergency access port is configured to be coupled to an enclosure,

wherein the enclosure is configured to link to the workpiece stocker to allow removing the workpieces from the workpiece stocker without exposing other workpieces in the workpiece stocker to outside ambient.

11. A workpiece stocker as in claim 10 wherein the enclosure comprises a portable clean room for linking with the workpiece stocker.

12. A workpiece stocker as in claim 10 wherein the enclosure comprises a load lock for the emergency access port.

13. A workpiece stocker as in claim 10 wherein the enclosure is configured for an operator to stay outside the enclosure while handling the workpieces.

14. A workpiece stocker as in claim 10 wherein the enclosure comprises a portable glove box for accessing the workpieces.

15. A workpiece stocker as in claim 10 wherein the enclosure comprises container boxes for allowing storing the workpieces before removing from the workpiece stocker.

16. A workpiece stocker comprising:

a chamber for storing a plurality of workpieces;

a robotic mechanism for transferring the workpieces from the chamber to an IO station;

a mating interface on an external wall of the workpiece stocker,

wherein the mating interface is configured to be mated to an enclosure,

wherein the enclosure is configured to link to the workpiece stocker for accessing the workpiece in the event of a failure of the stocker,

wherein accessing the workpiece comprises removing the workpieces from the workpiece stocker without exposing other workpieces in the workpiece stocker to outside ambient.

17. A workpiece stocker as in claim 16 wherein the enclosure comprises a portable clean room for linking with the workpiece stocker.

18. A workpiece stocker as in claim 16 wherein the enclosure comprises a load lock for the emergency access port.

19. A workpiece stocker as in claim 16 wherein the enclosure comprises a portable glove box for accessing the workpieces.

20. A workpiece stocker as in claim 16 wherein the enclosure comprises container boxes for allowing storing the workpieces before removing from the workpiece stocker.