×

Removable compartments for workpiece stocker

  • US 20140294546A1
  • Filed: 06/16/2014
  • Published: 10/02/2014
  • Est. Priority Date: 11/15/2006
  • Status: Active Grant
First Claim
Patent Images

1. A method for improving the operation of a workpiece stocker, the stocker comprisinga chamber for storing a plurality of workpieces, wherein the chamber is compartmentalized into a plurality of compartments, wherein the plurality of compartments are open during normal operation;

  • a robotic mechanism to transfer the workpieces from the chamber to an IO station; and

    an emergency access port for accessing the workpieces in the event of a failure of the workpiece stocker,the method comprisingassessing that the failure occurs; and

    sealing the plurality of compartments before accessing the stocker to prevent contamination, wherein the stocker is accessed through the emergency access port.

View all claims
  • 4 Assignments
Timeline View
Assignment View
    ×
    ×