APPARATUS AND METHOD FOR TRANSPORTING A VESSEL TO AND FROM A PECVD PROCESSING STATION
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0 Petitions
Accused Products
Abstract
Methods for processing a vessel, for example to provide a gas barrier or lubricity, are disclosed. First and second PECVD or other vessel processing stations or devices and a vessel holder comprising a vessel port are provided. An opening of the vessel can be seated on the vessel port. The interior surface of the seated vessel can be processed via the vessel port by the first and second processing stations or devices. Vessel barrier, lubricity and hydrophobic coatings and coated vessels, for example syringes and medical sample collection tubes are disclosed. A vessel processing system and vessel inspection apparatus and methods are also disclosed
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Citations
314 Claims
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1-263. -263. (canceled)
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264. A method of PECVD treatment of a first vessel, comprising:
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providing a first vessel having an open end, a closed end, and an interior surface; providing at least a first gripper configured for selectively holding and releasing the closed end of the first vessel; gripping the closed end of the first vessel with the first gripper; using the first gripper, transporting the first vessel to the vicinity of a vessel holder configured for seating to the open end of the first vessel; using the first gripper, axially advancing the first vessel and seating its open end on the vessel holder, establishing sealed communication between the vessel holder and the interior of the first vessel; introducing at least one gaseous reactant within the first vessel through the vessel holder; forming plasma within the first vessel under conditions effective to form a reaction product of the reactant on the interior surface of the first vessel; unseating the first vessel from the vessel holder; and using the first gripper or another gripper, axially transporting the first vessel away from the vessel holder; and releasing the first vessel from the gripper used to axially transport it away from the vessel holder. - View Dependent Claims (266)
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265. (canceled)
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267-310. -310. (canceled)
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311. Apparatus for PECVD treatment of a first vessel having an open end, a closed end, and an interior space, comprising:
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a vessel holder configured for seating to the open end of a vessel; a first gripper configured for selectively holding and releasing the closed end of a vessel and, while gripping the closed end of the vessel, transporting the vessel to the vicinity of the vessel holder; a seat on the vessel holder, the seat configured for establishing sealed communication between the vessel holder and the interior space of the first vessel; a reactant supply operatively connected for introducing at least one gaseous reactant within the first vessel through the vessel holder; a plasma generator configured for forming plasma within the first vessel under conditions effective to form a reaction product of the reactant on the interior surface of the first vessel; a vessel release for unseating the first vessel from the vessel holder; and a gripper which is the first gripper or another gripper, configured for axially transporting the first vessel away from the vessel holder, and then releasing the first vessel. - View Dependent Claims (313)
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312. (canceled)
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314-662. -662. (canceled)
Specification