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LAYERED TITANIUM DISILICIDE, METHOD OF PREPARATION AND APPLICATIONS THEREOF

  • US 20140295268A1
  • Filed: 03/11/2014
  • Published: 10/02/2014
  • Est. Priority Date: 03/12/2013
  • Status: Active Grant
First Claim
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1. A titanium disilicide (TiSi2) substrate characterized by a layered crystalline structure exhibiting Si only layers, wherein the TiSi2 substrate is at least partially coated with a thin layer of an oxide having a thickness from about 0.1 nm to about 10 nm.

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