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INERTIAL ANGULAR SENSOR OF BALANCED MEMS TYPE AND METHOD FOR BALANCING SUCH A SENSOR

  • US 20140299947A1
  • Filed: 12/03/2012
  • Published: 10/09/2014
  • Est. Priority Date: 12/06/2011
  • Status: Active Grant
First Claim
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1. A vibrating inertial angular sensor of MEMS type comprising a support of at least two masses which are mounted movably with respect to the support, and at least one electrostatic actuator and at least one electrostatic detector which are designed to respectively produce and detect a vibration of the masses, wherein the masses are suspended in a frame itself connected by suspension means to the support.

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