METHOD AND APPARATUS FOR MANUFACTURING A RESONATING STRUCTURE
First Claim
1. A mechanical resonator, comprising:
- a conductor;
an active layer coupled to conductor on a first surface; and
a compensating structure coupled to a second surface of the active layer,wherein the compensating structure comprises one or more materials having an adaptive resistance to deform that reduces a variance in a resonating frequency of the mechanical resonator (f0);
wherein at least the conductor, the active layer and the compensating structure form a mechanical resonating structure having a plurality of layers of materials;
wherein a thickness of each of the plurality of layers of materials results in a plurality of thickness ratios therebetween; and
wherein the mechanical resonating structure is constructed with target ranges for the plurality thickness ratios to enable selective tuning of a value of f0 and a value of a temperature for which temperature coefficient of frequency of the mechanical resonating structure is approximately zero (T0) by altering a thickness of at least one targetable material of the mechanical resonating structure.
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Accused Products
Abstract
Aspects of the subject disclosure include, for example, constructing a mechanical resonating structure by applying an active layer on a surface of a compensating structure, wherein the compensating structure comprises one or more materials having an adaptive resistance to deform that reduces a variance in a resonating frequency of the mechanical resonating structure, wherein at least the active layer and the compensating structure form a mechanical resonating structure having a plurality of layers of materials, and wherein a thickness of each of the plurality of layers of materials results in a plurality of thickness ratios therebetween. Other embodiments are disclosed.
11 Citations
20 Claims
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1. A mechanical resonator, comprising:
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a conductor; an active layer coupled to conductor on a first surface; and a compensating structure coupled to a second surface of the active layer, wherein the compensating structure comprises one or more materials having an adaptive resistance to deform that reduces a variance in a resonating frequency of the mechanical resonator (f0); wherein at least the conductor, the active layer and the compensating structure form a mechanical resonating structure having a plurality of layers of materials; wherein a thickness of each of the plurality of layers of materials results in a plurality of thickness ratios therebetween; and wherein the mechanical resonating structure is constructed with target ranges for the plurality thickness ratios to enable selective tuning of a value of f0 and a value of a temperature for which temperature coefficient of frequency of the mechanical resonating structure is approximately zero (T0) by altering a thickness of at least one targetable material of the mechanical resonating structure. - View Dependent Claims (2, 3, 4, 5, 6, 7)
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8. A method, comprising:
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constructing a mechanical resonating structure by applying an active layer on a surface of a compensating structure, wherein the compensating structure comprises one or more materials having an adaptive resistance to deform that reduces a variance in a resonating frequency of the mechanical resonating structure (f0), wherein at least the active layer and the compensating structure form a mechanical resonating structure having a plurality of layers of materials, and wherein a thickness of each of the plurality of layers of materials results in a plurality of thickness ratios therebetween; and adjusting one of the plurality thickness ratios to selectively tune a value of f0 and a value of a temperature for which temperature coefficient of frequency of the mechanical resonating structure is approximately zero (T0) by altering a thickness of at least one targetable material of the mechanical resonating structure. - View Dependent Claims (9, 10, 11, 12, 13, 14)
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15. A method, comprising:
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obtaining a mechanical resonating structure comprising an active layer and a compensating structure, wherein the compensating structure comprises one or more materials having an adaptive resistance to deform that reduces a variance in a resonating frequency of the mechanical resonating structure (f0), wherein at least the active layer and the compensating structure form a mechanical resonating structure having a plurality of layers of materials, and wherein a thickness of each of the plurality of layers of materials results in a plurality of thickness ratios therebetween; and adjusting one of the plurality thickness ratios to selectively tune a value of f0 and a value of a temperature for which temperature coefficient of frequency of the mechanical resonating structure is approximately zero (T0) by altering a thickness of at least one targetable material of the mechanical resonating structure. - View Dependent Claims (16, 17, 18, 19, 20)
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Specification