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METHOD AND APPARATUS FOR MANUFACTURING A RESONATING STRUCTURE

  • US 20140306580A1
  • Filed: 02/11/2014
  • Published: 10/16/2014
  • Est. Priority Date: 12/17/2008
  • Status: Active Grant
First Claim
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1. A mechanical resonator, comprising:

  • a conductor;

    an active layer coupled to conductor on a first surface; and

    a compensating structure coupled to a second surface of the active layer,wherein the compensating structure comprises one or more materials having an adaptive resistance to deform that reduces a variance in a resonating frequency of the mechanical resonator (f0);

    wherein at least the conductor, the active layer and the compensating structure form a mechanical resonating structure having a plurality of layers of materials;

    wherein a thickness of each of the plurality of layers of materials results in a plurality of thickness ratios therebetween; and

    wherein the mechanical resonating structure is constructed with target ranges for the plurality thickness ratios to enable selective tuning of a value of f0 and a value of a temperature for which temperature coefficient of frequency of the mechanical resonating structure is approximately zero (T0) by altering a thickness of at least one targetable material of the mechanical resonating structure.

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