PELLICLE FRAME AND PELLICLE WITH THIS

• US 20140307237A1
• Filed: 01/31/2014
• Published: 10/16/2014
• Est. Priority Date: 04/15/2013
• Status: Active Grant

• Current Assignee: Shin-Etsu Chemical Company Limited
• Original Assignee: Shin-Etsu Chemical Company Limited
• Inventors: Sekihara, Kazutoshi
• Granted Patent: US 9,395,634 B2
• Time in Patent Office: Days
• US Class Current: 355/30
• CPC Class Codes: C23C 28/00 Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D
• CPC Class Codes: C23C 4/08 containing only metal elements C23C4/073 takes precedence
• CPC Class Codes: C23C 4/18 After-treatment
• CPC Class Codes: G03F 1/64 characterised by the frames, e.g. structure or material, including bonding means therefor
• CPC Class Codes: G03F 7/70916 Pollution mitigation, i.e. mitigating effect of contamination or debris, e.g. foil traps

Abstract

A pellicle is proposed in which the frame is made of an aluminum alloy and at least the inner wall of the frame is entirely coated with a pure aluminum layer, which preferably has a purity of 99.7% or higher and a thickness of 3 through 50 micrometers; the pellicle frame with the pure aluminum layer may be subjected to anodic oxidation treatment, electric coloring, and void filling, and a resin layer can be formed as the outermost layer.

Claims

1. A pellicle frame made of an aluminum alloy, characterized by that at least inner wall of the pellicle frame is coated with a pure aluminum layer.

2. The pellicle frame as claimed in claim 1 wherein the purity of said pure aluminum layer is 99.7% or higher.

3. The pellicle frame as claimed in claim 1 wherein surface roughness Ra of said pure aluminum layer is 0.5-5 micrometers.

4. The pellicle frame as claimed in claim 1 wherein said pure aluminum layer is smoothed by polishing.

5. The pellicle frame as claimed in claim 1 wherein a thickness of said pure aluminum layer is 3 through 50 micrometers.

6. The pellicle frame as claimed in claim 1 wherein said pure aluminum layer is formed by means of a method selected from thermal spraying and vapor deposition.

7. The pellicle frame as claimed in claim 1 wherein after the formation of said pure aluminum layer, the pellicle frame is subjected to anodic oxidation treatment, coloring such as electric coloring, and void filling treatment.

8. The pellicle frame as claimed in claim 7 wherein after the void filling treatment a resin layer is formed as an outermost layer.

9. The pellicle frame as claimed in claim 8 wherein said resin layer is made of a material selected from an acrylic resin, a polyester resin, a silicone resin, and a fluorine-containing resin.

10. A pellicle made with a pellicle frame as described in claim 1.