METHODS FOR DIRECT PRODUCTION OF GRAPHENE ON DIELECTRIC SUBSTRATES, AND ASSOCIATED ARTICLES/DEVICES
First Claim
1. A method of making a coated article comprising a graphene-inclusive film on a substrate, the method comprising:
- disposing a metal-inclusive catalyst layer on the substrate;
exposing the substrate with the metal-inclusive catalyst layer thereon to a precursor gas and a strain-inducing gas at a temperature of no more than 900 degrees C., the strain-inducing gas inducing strain in the metal-inclusive catalyst layer; and
forming and/or allowing formation of graphene both over and contacting the metal-inclusive catalyst layer, and between the substrate and the catalyst metal-inclusive catalyst layer, in making the coated article.
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Accused Products
Abstract
Certain example embodiments of this invention relate to methods for large area graphene precipitation onto glass, and associated articles/devices. For example, a coated article including a graphene-inclusive film on a substrate, and/or a method of making the same, is provided. A metal-inclusive catalyst layer (e.g., of or including Ni and/or the like) is disposed on the substrate. The substrate with the catalyst layer thereon is exposed to a precursor gas and a strain-inducing gas at a temperature of no more than 900 degrees C. Graphene is formed and/or allowed to form both over and contacting the catalyst layer, and between the substrate and the catalyst layer, in making the coated article. The catalyst layer, together with graphene formed thereon, is removed, e.g., through excessive strain introduced into the catalyst layer as associated with the graphene formation. Products including such articles, and/or methods of making the same, also are contemplated herein.
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Citations
31 Claims
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1. A method of making a coated article comprising a graphene-inclusive film on a substrate, the method comprising:
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disposing a metal-inclusive catalyst layer on the substrate; exposing the substrate with the metal-inclusive catalyst layer thereon to a precursor gas and a strain-inducing gas at a temperature of no more than 900 degrees C., the strain-inducing gas inducing strain in the metal-inclusive catalyst layer; and forming and/or allowing formation of graphene both over and contacting the metal-inclusive catalyst layer, and between the substrate and the catalyst metal-inclusive catalyst layer, in making the coated article. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16, 17, 18, 19, 20)
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21. A method of making a coated article comprising a graphene-inclusive film on a substrate, the method comprising:
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disposing a metal-inclusive catalyst layer on the substrate; rapidly heating to 700-900 degrees C. the substrate with the metal-inclusive catalyst layer thereon; annealing in a He gas inclusive environment, the substrate with the metal-inclusive catalyst layer thereon, the He gas being provided at a pressure selected to engineer a desired stress in the metal-inclusive catalyst layer; exposing the substrate with the catalyst layer thereon to a carbon-inclusive precursor gas; and forming and/or allowing formation of graphene both over and contacting the metal-inclusive catalyst layer, and between the substrate and the metal-inclusive catalyst layer, in making the coated article. - View Dependent Claims (22, 23, 24, 25, 26, 27, 28, 29, 30)
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31. A method of making a coated article comprising a graphene-inclusive film on a substrate, the method comprising:
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disposing a metal-inclusive catalyst layer on the substrate; heating to 700-900 degrees C. the substrate with the metal-inclusive catalyst layer thereon; exposing the substrate with the metal-inclusive catalyst layer thereon to a carbon-inclusive precursor gas; forming and/or allowing formation of graphene both over and contacting the metal-inclusive catalyst layer, and between the substrate and the metal-inclusive catalyst layer; and mechanically delaminating from the substrate the metal-inclusive catalyst layer and the graphene on the metal-inclusive catalyst layer, so that the graphene formed between the substrate and the metal-inclusive catalyst layer remains on the substrate following the mechanical delaminating, in making the coated article, wherein the metal-inclusive catalyst layer is engineered to have a stress that facilitates the mechanical delaminating.
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Specification