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MEMS PRESSURE SENSOR, ELECTRONIC DEVICE, ALTIMETER, ELECTRONIC APPARATUS, AND MOVING OBJECT

  • US 20140311241A1
  • Filed: 04/21/2014
  • Published: 10/23/2014
  • Est. Priority Date: 04/22/2013
  • Status: Abandoned Application
First Claim
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1. A MEMS pressure sensor comprisinga diaphragm portion that becomes displaced according to a pressure, anda resonator arranged on a main surface of the diaphragm portion,wherein the resonator includesa first fixed electrode provided on the main surface, anda drive electrode having a second fixed electrode provided on the main surface, a movable electrode spaced apart from the first fixed electrode, overlapping with the first fixed electrode, as viewed in a plan view seen from a normal direction to the main surface, and driven in a direction that intersects the main surface, and a supporting electrode supporting the movable electrode and connected to the second fixed electrode.

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