DIELECTRIC WINDOW FOR PLASMA TREATMENT DEVICE, AND PLASMA TREATMENT DEVICE

• US 20140312767A1
• Filed: 11/08/2012
• Published: 10/23/2014
• Est. Priority Date: 11/11/2011
• Status: Active Grant

• Current Assignee: Tokyo Electron Limited
• Original Assignee: Tokyo Electron Limited
• Inventors: Tian, Caizhong, Matsumoto, Naoki, Mihara, Naoki, Koyama, Koji, Takahashi, Kazuki, Yoshikawa, Jun, Moyama, Kazuki, Tanikawa, Takehiro
• Granted Patent: US 9,048,070 B2
• Time in Patent Office: Days
• US Class Current: 315/39
• CPC Class Codes: H01J 37/32238 Windows

Abstract

A dielectric window for a plasma treatment device for a plasma treatment device that uses microwaves as a plasma source. The dielectric window is circular-plate-shaped and allows microwaves to propagate. The dielectric window has a recess that has an opening on the lower-surface side and that indents in the plate thickness direction of the dielectric window, and is provided to the lower surface at which plasma is generated when the dielectric window is provided to the plasma treatment device. The recess has a bottom surface extending in the direction perpendicular to the plate thickness direction, and a side surface extending in the plate thickness direction from the circumferential edge of the bottom surface toward the opening of the recess. In addition, an inclined surface extends at an incline relative to the plate thickness direction from the opening-side circumferential edge of the side surface toward the opening of the recess.

Claims

1. A dielectric window for a plasma treatment device which is provided in a plasma treatment device using microwaves as a plasma source,

wherein the dielectric window for the plasma treatment device (“

dielectric window”

) is formed in a disk shape and configured to propagate the microwaves,

wherein a recess is provided on a bottom surface of the dielectric window, in which the bottom surface becomes a plasma generation side when the dielectric window is provided in the plasma treatment device, an opening of the recess becomes the bottom surface side, and the recess is recessed inwardly in a plate thickness direction of the dielectric window, and

wherein the recess is constituted by a base surface which extends in a direction perpendicular to the plate thickness direction of the dielectric window, a side surface which extends in the plate thickness direction of the dielectric window toward the opening side of the recess from a circumferential edge of the base surface, and an inclined surface which extends at an incline with respect to the plate thickness direction of the dielectric window from an opening side circumferential edge of the side surface toward the opening side of the recess.

2. The dielectric window of claim 1, wherein a plurality of recesses is provided in the dielectric window.

3. The dielectric window of claim 2, wherein the plurality of recesses is concentrically provided.

4. The dielectric window of claim 2, wherein the plurality of recesses has a rotational symmetry about a center of the dielectric window when the dielectric window is viewed in the plate thickness direction.

5. The dielectric window of claim 1, wherein an angle between the bottom surface and the inclined surface ranges from 40°

to 60°

in a cross-sectional view of the dielectric window when cut along a plane which includes the recess and extends in the plate thickness direction of the dielectric window.

6. The dielectric window of claim 1, wherein the inclined surface includes a curved surface.

7. A plasma treatment device using microwaves as a plasma source, comprising

a dielectric window for a plasma treatment device (“

dielectric window”

) which is formed in a disk shape and configured to propagate the microwaves,

wherein a recess is provided on a bottom surface of the dielectric window, in which the bottom surface becomes a plasma generation side when the dielectric window is provided in the plasma treatment device, an opening of the recess becomes the bottom surface side, and the recess is recessed inwardly in a plate thickness direction of the dielectric window, and

wherein the recess is constituted by a base surface which extends in a direction perpendicular to the plate thickness direction of the dielectric window, a side surface which extends in the plate thickness direction of the dielectric window toward the opening side of the recess from a circumferential edge of the base surface, and an inclined surface which extends at an incline with respect to the plate thickness direction of the dielectric window from an opening side circumferential edge of the side surface toward the opening side of the recess.

8. The plasma treatment device of claim 7, further comprising a slot antenna plate formed in a disk shape and provided with a plurality of slots penetrating in the plate thickness direction of the slot antenna plate, the slot antenna plate being disposed at a top side of the dielectric window to radiate the microwaves toward the dielectric window.

9. A dielectric window for a plasma treatment device which is provided in a plasma treatment device using microwaves as a plasma source,

wherein the dielectric window for the plasma treatment device (“

dielectric window”

) is formed in a disk shape and configured to propagate the microwaves,

wherein a recess is provided on a bottom surface of the dielectric window in which the bottom surface becomes a plasma generation side when the dielectric window is provided in the plasma treatment device, an opening of the recess becomes the bottom surface side, and the recess is recessed inwardly in a plate thickness direction of the dielectric window,

wherein the recess is constituted by a base surface which extends in a direction perpendicular to the plate thickness direction of the dielectric window, a side surface which extends in the plate thickness direction of the dielectric window toward the opening side of the recess from a circumferential edge of the base surface, and an inclined surface which extends at an incline with respect to the plate thickness direction of the dielectric window from an opening side circumferential edge of the side surface toward the opening side of the recess, and

wherein at least one of portions between the base surface and the side surface, between the side surface and the inclined surface, and between the inclined surface and the bottom surface is joined by a curved surface.

10. A dielectric window for a plasma treatment device which is provided in a plasma treatment device using microwaves as a plasma source,

wherein the dielectric window for the plasma treatment device (“

dielectric window”

) is formed in a disk shape and configured to propagate the microwaves,

wherein a recess is provided on a bottom surface of the dielectric window in which the bottom surface becomes a plasma generation side when the dielectric window is provided in the plasma treatment device, an opening of the recess becomes the bottom surface side, and the recess is recessed inwardly in a plate thickness direction of the dielectric window,

wherein the recess is constituted by a base surface which extends in a direction perpendicular to the plate thickness direction of the dielectric window, a side surface which extends in the plate thickness direction of the dielectric window toward the opening side of the recess from a circumferential edge of the base surface, and an inclined surface which extends at an incline with respect to the plate thickness direction of the dielectric window from an opening side circumferential edge of the side surface toward the opening side of the recess, and

wherein the recess is recessed in the form of an elongated hole.