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MEMS PRESSURE SENSORS WITH INTEGRATED BAFFLES

  • US 20140318656A1
  • Filed: 12/09/2013
  • Published: 10/30/2014
  • Est. Priority Date: 04/30/2013
  • Status: Active Grant
First Claim
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1. A pressure sensor system for sensing the pressure of a gas or liquid comprising:

  • a housing having an entry port for the gas or liquid;

    a pressure sensor within the housing; and

    a baffle positioned between the entry port and the pressure sensor, the baffle having;

    one or more inlets oriented to receive gas or liquid that enters the entry port;

    one or more outlets oriented to deliver the received gas or liquid to pressure sensor; and

    one or more sealed flow channels that prevent the gas or liquid from escaping from the baffle, other than through the one or more outlets,at least one of the outlets being located within no more than one millimeter of a location on the pressure sensor.

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