METHOD FOR MANUFACTURING OXIDE SEMICONDUCTOR THIN FILM TRANSISTOR, AND ACTIVE OPERATING DISPLAY DEVICE AND ACTIVE OPERATING SENSOR DEVICE USING SAME
First Claim
1. A method for manufacturing an oxide semiconductor thin film transistor, the method comprising:
- a first step of forming a gate electrode by depositing and patterning a gate layer over a substrate;
a second step of sequentially depositing a gate insulation film, an oxide semiconductor, and an etch stopper over the gate electrode and patterning the etch stopper;
a third step of patterning the oxide semiconductor;
a fourth step of forming a source electrode and a drain electrode over the patterned oxide semiconductor; and
a fifth step of depositing a protective layer over the source electrode and the drain electrode and forming a contact hole in the protective layer,wherein the oxide semiconductor has a thickness smaller than or equal to 4 nm.
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Accused Products
Abstract
The present invention relates to a method for manufacturing an oxide semiconductor thin film transistor and to an actively operating display device and actively operating sensor display device using the same. A method for manufacturing an oxide semiconductor thin film transistor includes: forming a gate electrode by depositing and patterning a gate layer over a substrate; sequentially depositing a gate insulation film, an oxide semiconductor, and an etch stopper over the gate electrode and patterning the etch stopper; patterning the oxide semiconductor; forming a source electrode and a drain electrode over the patterned oxide semiconductor; and depositing a protective layer over the source electrode and the drain electrode and forming a contact hole in the protective layer, where the oxide semiconductor is formed to a thickness that is smaller than or equal to 4 nm.
4 Citations
34 Claims
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1. A method for manufacturing an oxide semiconductor thin film transistor, the method comprising:
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a first step of forming a gate electrode by depositing and patterning a gate layer over a substrate; a second step of sequentially depositing a gate insulation film, an oxide semiconductor, and an etch stopper over the gate electrode and patterning the etch stopper; a third step of patterning the oxide semiconductor; a fourth step of forming a source electrode and a drain electrode over the patterned oxide semiconductor; and a fifth step of depositing a protective layer over the source electrode and the drain electrode and forming a contact hole in the protective layer, wherein the oxide semiconductor has a thickness smaller than or equal to 4 nm. - View Dependent Claims (2, 3, 4, 5, 6, 7)
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8. A method for manufacturing an oxide semiconductor thin film transistor, the method comprising:
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a first step of sequentially depositing a buffer layer, an oxide semiconductor, a gate insulation film, and a gate layer over a substrate; a second step of forming a gate electrode by patterning the gate layer; a third step of patterning the oxide semiconductor; a fourth step of depositing a protective layer over the oxide semiconductor and forming a contact hole in the protective layer; and a fifth step of forming a source electrode and a drain electrode over the contact hole, wherein the oxide semiconductor has a thickness smaller than or equal to 4 nm.
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9-12. -12. (canceled)
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13. A method for manufacturing an oxide semiconductor thin film transistor, the method comprising:
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a first step of depositing and patterning a source electrode and a drain electrode over a substrate; a second step of depositing an oxide semiconductor, a gate insulation film, and a gate layer over the source electrode and the drain electrode; a third step of patterning the gate insulation film and the gate layer; a fourth step of patterning the oxide semiconductor; and a fifth step of depositing a protective layer over the patterned gate insulation film and the oxide semiconductor and forming a contact hole, wherein the oxide semiconductor has a thickness smaller than or equal to 4 nm.
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14-17. -17. (canceled)
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18. A method for manufacturing an oxide semiconductor thin film transistor, the method comprising:
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a first step of depositing a buffer layer and an oxide semiconductor over a substrate and patterning the oxide semiconductor; a second step of depositing and patterning a source electrode and a drain electrode over the oxide semiconductor; a third step of forming a gate pattern by depositing a gate insulation film and a gate layer over the source electrode and the drain electrode and patterning the gate layer; and a fourth step of forming and patterning a protective layer over the gate pattern, wherein the oxide semiconductor has a thickness smaller than or equal to 4 nm.
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19-22. -22. (canceled)
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23. A method for manufacturing an oxide semiconductor thin film transistor, the method comprising:
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a first step of forming a gate electrode by depositing and patterning a gate layer over a substrate; a second step of depositing a gate insulation film and an oxide semiconductor over the gate electrode; a third step of patterning the oxide semiconductor; a fourth step of forming a source electrode and a drain electrode over the patterned oxide semiconductor; and a fifth step of depositing a protective layer over the source electrode and the drain electrode and forming a contact hole in the protective layer, wherein the oxide semiconductor has a thickness smaller than or equal to 4 nm.
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24-27. -27. (canceled)
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28. A method for manufacturing an oxide semiconductor thin film transistor, the method comprising:
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a first step of forming a gate electrode by depositing and patterning a gate layer over a substrate; a second step of depositing a gate insulation film, a source electrode, and a drain electrode over the gate electrode; a third step of patterning the source electrode and the drain electrode; a fourth step of depositing and patterning an oxide semiconductor over the patterned source electrode and drain electrode; and a fifth step of depositing a protective layer over the patterned oxide semiconductor and forming a contact hole in the protective layer, wherein the oxide semiconductor has a thickness smaller than or equal to 4 nm.
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29-32. -32. (canceled)
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33. A thin film transistor comprising a substrate, a gate electrode, a source electrode, a drain electrode, and an oxide semiconductor, wherein the oxide semiconductor has a thickness smaller than or equal to 4 nm.
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34. (canceled)
Specification