MEMS SENSORS
First Claim
1. A MEMS sensor comprising:
- a vibrating sensing structure formed from a semiconductor substrate layer, the semiconductor substrate layer being mounted on a pedestal comprising an electrically insulating substrate layer bonded to the semiconductor substrate to form a rectangular sensor chip; and
the pedestal further comprising at least one electrically insulating spacer layer for mounting the sensor chip to a housing, wherein the electrically insulating spacer layer is octagonal.
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Accused Products
Abstract
A MEMS sensor comprises a vibrating sensing structure formed from a semiconductor substrate layer (50). The semiconductor substrate layer (50) is mounted on a pedestal comprising an electrically insulating substrate layer (52) bonded to the semiconductor substrate (50) to form a rectangular sensor chip. The pedestal further comprises an electrically insulating spacer layer (54) for mounting the sensor chip to a housing. The electrically insulating spacer layer (54) is octagonal. When the vibrating sensing structure is excited into a cos 2θ vibration mode pair, the quadrature bias arising from any mode frequency split is not affected by changes in temperature as a result of the octagonal spacer layer (54).
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Citations
15 Claims
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1. A MEMS sensor comprising:
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a vibrating sensing structure formed from a semiconductor substrate layer, the semiconductor substrate layer being mounted on a pedestal comprising an electrically insulating substrate layer bonded to the semiconductor substrate to form a rectangular sensor chip; and the pedestal further comprising at least one electrically insulating spacer layer for mounting the sensor chip to a housing, wherein the electrically insulating spacer layer is octagonal. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 14, 15)
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9. A method of making a MEMS sensor die comprising:
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forming a vibrating sensing structure on a semiconductor substrate layer; mounting the semiconductor substrate layer to an electrically insulating substrate layer so that rectangular sensor dies can be defined by orthogonal x and y cutting lines in the plane of the substrate layers; mounting the electrically insulating substrate layer to a spacer layer that has voids formed at at least some junctions of the x and y cutting lines; and dicing the layers to form sensor dies comprising a rectangular sensor chip mounted on an octagonal spacer layer. - View Dependent Claims (10, 11, 12, 13)
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Specification