MICRO-ELECTRO-MECHANICAL SYSTEM (MEMS) STRUCTURES AND DESIGN STRUCTURES
First Claim
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1. A method, comprising:
- forming a bumper extending from a Micro-Electro-Mechanical System (MEMS) beam structure provided within a cavity structure; and
forming a dummy landing structure on an opposing side of the cavity structure from the MEMS beam, which is laterally offset from the bumper when the MEMS beam is in a non-actuated state.
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Abstract
Dummy Micro-Electro-Mechanical System (MEMS) structures, methods of manufacture and design structures are disclosed. The method includes forming a bumper extending from a Micro-Electro-Mechanical System (MEMS) beam structure provided within a cavity structure. The method further includes forming a dummy landing structure on an opposing side of the cavity structure from the MEMS beam, which is laterally offset from the bumper when the MEMS beam is in a non-actuated state.
11 Citations
19 Claims
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1. A method, comprising:
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forming a bumper extending from a Micro-Electro-Mechanical System (MEMS) beam structure provided within a cavity structure; and forming a dummy landing structure on an opposing side of the cavity structure from the MEMS beam, which is laterally offset from the bumper when the MEMS beam is in a non-actuated state. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14)
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- 15. A method comprising determining a size and/or location offset of a dummy landing structure with respect to a bumper by accounting for at least one of process variations of fabricating a MEMS structure and affects of operating conditions on the MEMS structure such that the bumper always lands on the dummy landing structure and does not contact an actuator of the MEMS structure during actuation.
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19. A structure comprising a MEMS structure comprising a bumper extending from a MEMS beam and dummy landing structure aligned with the bumper at any given operating temperature during actuation of the MEMS beam at any given operating temperature such that the bumper always lands on the dummy landing structure and does not contact an actuator of the MEMS structure, wherein the dummy landing structure is offset from the bumper prior to actuation of the MEMS structure.
Specification