SENSOR ELEMENT, ELECTRONIC APPARATUS AND MOVING OBJECT
First Claim
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1. A sensor element comprising:
- a detection electrode section;
a movable body that is provided to face the detection electrode section; and
a protruding section that is provided in a region where the detection electrode section is provided in a plan view of the detection electrode section seen in a vertical direction, and protrudes toward the movable body,wherein at least a part of a surface of the protruding section includes an insulating material.
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Abstract
A sensor element includes: a detection electrode section; a movable body that is provided to face the detection electrode section; and a protruding section that is provided in a region where the detection electrode section is provided in a plan view of the detection electrode section seen in a vertical direction and protrudes toward the movable body. At least a part of a surface of the protruding section is made of an insulating material.
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Citations
18 Claims
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1. A sensor element comprising:
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a detection electrode section; a movable body that is provided to face the detection electrode section; and a protruding section that is provided in a region where the detection electrode section is provided in a plan view of the detection electrode section seen in a vertical direction, and protrudes toward the movable body, wherein at least a part of a surface of the protruding section includes an insulating material. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 17, 18)
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16. A sensor element comprising:
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a detection electrode section; a movable body that is provided to face the detection electrode section; and a protruding section that protrudes toward the movable body, wherein the detection electrode section includes a first detection electrode section and a second detection electrode section that are disposed at positions that face the movable body, and wherein the protruding section is provided between the first detection electrode section and the second detection electrode section in a plan view of the detection electrode section seen in a vertical direction.
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Specification