MICROPATTERNED COMPONENT AND METHOD FOR MANUFACTURING A MICROPATTERNED COMPONENT

• US 20140339654A1
• Filed: 05/14/2014
• Published: 11/20/2014
• Est. Priority Date: 05/14/2013
• Status: Active Grant

• Current Assignee: Robert Bosch GmbH
• Original Assignee: Robert Bosch GmbH
• Inventors: Classen, Johannes
• Granted Patent: US 9,229,020 B2
• Time in Patent Office: Days
• US Class Current: 257/415
• CPC Class Codes: B81B 2201/0235 Accelerometers
• CPC Class Codes: B81B 2201/0242 Gyroscopes
• CPC Class Codes: B81B 2203/04 Electrodes
• CPC Class Codes: B81B 2203/051 Translation according to an axis parallel to the substrate
• CPC Class Codes: B81B 3/0078 Constitution or structural means for improving mechanical properties not provided for in B81B3/007 - B81B3/0075
• CPC Class Codes: G01C 19/5755 the devices having a single sensing mass
• CPC Class Codes: G01P 1/003 used for damping
• CPC Class Codes: G01P 15/0802 Details
• CPC Class Codes: G01P 15/0888 for indicating angular acceleration
• CPC Class Codes: G01P 15/097 by vibratory elements
• CPC Class Codes: G01P 15/125 by capacitive pick-up
• CPC Class Codes: G01P 2015/0814 for translational movement of the mass, e.g. shuttle type
• CPC Class Codes: G01P 2015/0877 using integrated interconnect structures
• CPC Class Codes: G01P 2015/088 for providing wafer-level encapsulation
• CPC Class Codes: G01P 2015/0882 for providing damping of vibrations

Abstract

A micropatterned component, for measuring accelerations and/or yaw rates, including a substrate having a principal plane of extension of the substrate, an electrode, and a further electrode; the electrode having a principal plane of extension of the electrode, and the further electrode having a principal plane of extension of the further electrode; the principal plane of extension of the electrode being set parallelly to a normal direction perpendicular to the principal plane of extension of the substrate; the principal plane of extension of the further electrode being set parallelly to the normal direction; the electrode having an electrode height extending in the normal direction; the electrode having a flow channel extending completely through the electrode in a direction parallel to the principal plane of extension of the substrate; the flow channel having a channel depth extending parallelly to the normal direction; the channel depth being less than the electrode height.

Claims

1. A micropatterned component for measuring at least one of an acceleration and a yaw rate, comprising:

a substrate having a principal plane of extension of the substrate;

an electrode; and

a further electrode;

wherein the electrode has a principal plane of extension of the electrode and the further electrode has a principal plane of extension of the further electrode,

wherein the principal plane of extension of the electrode is positioned parallelly to a normal direction perpendicular to the principal plane of extension of the substrate,

wherein the principal plane of extension of the further electrode is set parallel to the normal direction,

wherein the electrode has an electrode height extending in the normal direction,

wherein the electrode has a flow channel extending completely through the electrode in a direction parallel to the principal plane of extension of the substrate,

wherein the flow channel has a channel depth extending parallelly to the normal direction, and

wherein the channel depth is less than the electrode height.

2. The micropatterned component of claim 1, wherein the channel depth is between 60% and 95% of the electrode height.

3. The micromechanical component of claim 1, wherein the electrode has a principal direction of extension of the electrode, parallel to the principal plane of extension of the electrode and parallel to the principal plane of extension of the substrate, wherein the electrode has several flow channels situated along the principal direction of extension of the electrode, wherein the several flow channels have a channel spacing, and wherein the channel spacing is less than the electrode height.

4. The micromechanical component of claim 1, wherein the electrode has a plurality of partial electrodes spaced apart from one another by the several flow channels, wherein the partial electrodes are situated on a common carrier, wherein the electrode is formed from a functional layer, and wherein the carrier is formed from a further functional layer connected to the functional layer.

5. The micromechanical component of claim 1, wherein the partial electrodes are interconnected in an electrically conductive manner via the carrier, which is connected in an electrically conductive manner to a conducting element via one electrode contact element, wherein the conducting element is situated on the substrate or situated in a further substrate connected to the substrate, and wherein the further substrate includes an integrated circuit.

6. The micromechanical component of claim 1, wherein the electrode is fixed in position relative to the substrate, wherein the further electrode is displaceable relative to the substrate, into a motion along a vibration direction, wherein the vibration direction is set parallel to the principal plane of extension of the substrate, and wherein the vibration direction is set perpendicularly to at least one of the principal plane of extension of the electrode and/or to the principal plane of extension of the further electrode.

7. The micromechanical component of claim 1, wherein the further electrode has the electrode height parallel to the normal direction, wherein the further electrode has a further flow channel extending completely through the further electrode, in parallel with the principal plane of extension of the substrate, wherein the further flow channel has a further channel depth extending parallelly to the normal direction, wherein the further channel depth is less than the electrode height, and wherein the flow channel and the further flow channel are positioned one behind the other in series, or side-by-side in a staggered manner, in a projection direction running along the vibration direction.

13. The micropatterned component of claim 1, wherein the channel depth is between 70% and 90% of the electrode height.

14. The micropatterned component of claim 1, wherein the channel depth is approximately 80% of the electrode height.

8. A method for manufacturing a micropatterned component for measuring at least one of an acceleration and a yaw rate, the method comprising:

providing, in a first production task, a substrate, which includes a substrate layer having a principal plane of extension of the substrate;

positioning, in a second production task, a functional layer over the substrate layer in a normal direction perpendicular to the principal plane of extension of the substrate;

depositing a first patterning mask on the functional layer;

depositing a second patterning mask on the functional layer, over the first patterning mask, in the normal direction;

forming, during a first time interval, an electrode and a further electrode from the functional layer as a function of the second patterning mask;

removing subsequently the second patterning mask;

forming, in a third production task, during a second time interval subsequent to the first time interval, a flow channel from the electrode as a function of the first patterning mask.

9. The method of claim 8, wherein in the second production task, the electrode and the further electrode are formed from the functional layer as a function of the second patterning mask, so as to have a principal plane of extension of the electrode and a principal plane of extension of the further electrode, respectively, wherein the principal plane of extension of the electrode is set parallel to the normal direction, wherein the principal plane of extension of the further electrode is set parallel to the normal direction, and wherein an electrode height extending in the normal direction is formed at the electrode.

10. The method of claim 8, wherein in the third production task, a flow channel, which extends completely through the electrode in a direction parallel to the principal plane of extension of the substrate and has a channel depth extending parallelly to the normal direction, is formed from the electrode as a function of the first patterning mask, and wherein the channel depth is formed as a function of the second time interval, so as to be less than the electrode height.

11. A method for manufacturing a micropatterned component, for measuring at least one of an acceleration and a yaw rate, the method comprising:

providing, in a first production task, a substrate which includes a substrate layer having a principal plane of extension of the substrate, the component including a layer construction having the substrate layer, a functional layer and a further functional layer;

positioning, in a second production task, the further functional layer being positioned over the substrate layer in a normal direction perpendicular to the principal plane of extension of the substrate;

depositing a patterning mask on the functional layer;

positioning, in a third production task, the functional layer over the further functional layer in the normal direction;

forming, in a fourth production task, an electrode and a further electrode from the functional layer and the further functional layer; and

forming a flow channel has a channel depth extending parallelly to the normal direction from the electrode as a function of the patterning mask.

12. The method of claim 11, wherein in the third production task, the functional layer is provided with a functional layer thickness, and wherein in the fourth production task, the flow channel is formed to have the channel depth equal to the functional layer thickness.