Microgyroscope for Determining Rotational Movements About Three Spatial Axes which are Perpendicular to One Another
First Claim
1. A gyroscope for detecting movement around a z axis, the gyroscope comprising:
- a substrate;
at least one anchor coupled to the substrate;
a first driving mass coupled to the at least one anchor, the first driving mass radially oscillate with respect to a location on the substrate;
a second driving mass coupled to the at least one anchor, the second driving mass radially oscillate with respect to a location on the substrate;
a first sensor electrode coupled to the first driving mass, the first sensor electrode detects a first capacitive change caused by a rotational movement around the z-axis and generates a first signal; and
a second sensor electrode coupled to the first driving mass, the second sensor electrode detects a second capacitive change caused by the rotational movement around the z-axis and generates a second signal, the first and second signals relate to a differential measurement of the rotational movement around the z-axis.
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Abstract
A micro gyroscope for determining rotational movements about three spatial axes x, y and z, which are perpendicular to one another has a substrate (I) on which a plurality of masses (2, 3) oscillating tangentially about the z axis, which is perpendicular to the substrate (I), are arranged. The oscillating masses (2, 3) are fastened on the substrate (I) by means of springs (5, 6, 8) and tie bolts (7, 9). Driving elements (II) serve to maintain oscillating, tangential vibrations of the masses (2, 3) about the z axis, as a result of which, upon rotation of the substrate (I) about any spatial axis, the masses (2, 3) are subjected to Corolis forces and deflections caused as a result. Sensor elements detect the deflections of the masses (2, 3) on the basis of the Corolis forces generated. Some of the masses (2, 3) oscillating about the z axis are mounted in a tiltable manner substantially about the x axis which runs parallel to the substrate (I). Others of the masses (2, 3) oscillating about the z axis are mountable in a tiltable manner substantially about the y axis, which likewise runs parallel to the substrate (I). At least one other of the oscillating masses (2, 3) can be additionally at least partially deflected substantially radially to the z axis in the x-y plane parallel to the plane of the substrate (I). Said additionally radially deflectable z mass (3) is assigned a sensor element (12) which can likewise be deflected radially with respect to the z axis but does not oscillate about the z axis.
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Citations
20 Claims
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1. A gyroscope for detecting movement around a z axis, the gyroscope comprising:
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a substrate; at least one anchor coupled to the substrate; a first driving mass coupled to the at least one anchor, the first driving mass radially oscillate with respect to a location on the substrate; a second driving mass coupled to the at least one anchor, the second driving mass radially oscillate with respect to a location on the substrate; a first sensor electrode coupled to the first driving mass, the first sensor electrode detects a first capacitive change caused by a rotational movement around the z-axis and generates a first signal; and a second sensor electrode coupled to the first driving mass, the second sensor electrode detects a second capacitive change caused by the rotational movement around the z-axis and generates a second signal, the first and second signals relate to a differential measurement of the rotational movement around the z-axis. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9)
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10. A method for detecting rotational rate about a z-axis, the method comprising:
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causing radial oscillation of a first pair of driving masses relative to a location on a substrate, the first pair of driving masses oscillating 180 degrees out of phase with each other and along a first axis; detecting a first capacitance change within a first sensor electrode associated with a first driving mass within the first pair of driving masses; detecting a second capacitance change within a second sensor electrode associated with a second driving mass within the second pair of driving masses; and determining a first rotation rate about the z-axis based at least in part on the first and second capacitance changes. - View Dependent Claims (11, 12, 13, 14, 15)
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16. A gyroscope comprising:
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a substrate; an anchor coupled to the substrate; a first drive mass coupled to the anchor, the first drive mass radially oscillates along a first axis; a second drive mass coupled to the anchor, the second drive mass radially oscillates along the first axis and is synchronized with the first drive mass; and a first synchronization spring coupling the first and second drive masses, the synchronized radial oscillation of the first and second drive masses being at least partially controlled by the first synchronization spring. - View Dependent Claims (17, 18, 19, 20)
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Specification