REMOTE PLASMA SYSTEM HAVING SELF-MANAGEMENT FUNCTION AND SELF MANAGEMENT METHOD OF THE SAME

• US 20140346952A1
• Filed: 08/27/2013
• Published: 11/27/2014
• Est. Priority Date: 05/22/2013
• Status: Active Grant

• Current Assignee: New Power Plasma Co., Ltd.
• Original Assignee: Dai Kyu Choi
• Inventors: CHOI, Dai Kyu
• Granted Patent: US 9,349,575 B2
• Time in Patent Office: Days
• US Class Current: 315/111.51
• CPC Class Codes: H01J 37/32357 Generation remote from the workpiece, e.g. down-stream
• CPC Class Codes: H01J 37/32917 Plasma diagnostics
• CPC Class Codes: H01J 37/32935 Monitoring and controlling tubes by information coming from the object and/or discharge
• CPC Class Codes: H01J 37/3299 Feedback systems
• CPC Class Codes: H05H 1/46 using applied electromagnetic fields, e.g. high frequency or microwave energy H05H1/26 takes precedence
• CPC Class Codes: H05H 1/463 using antennas or applicators

Abstract

A remote plasma system having a self-management function measures an operating state of a remote plasma generator while a remote plasma generator operates, which generates plasma and remotely supplies the generated plasma to a process chamber, thereby allowing a process manager to check the measured operating state and performing a required process control depending on an operating state. According to the remote plasma system having the self-management function, it is possible to check operating state information of the remote plasma generator and plasma treatment process progress state information in the process chamber in real time so as to determine whether the remote plasma generator normally operates and immediately sense occurrence of an error during the operation.

Claims

1. A remote plasma system having a self management function, comprising:

a remote plasma generator generating plasma and remotely supplying the generated plasma to a process chamber;

a sensor unit including one or more voltage measurement sensors for measuring voltage induced to a generator body of the remote plasma generator; and

a control unit generating operating state information of the remote plasma generator based on voltage values measured by the one or more voltage measurement sensors.

2. The remote plasma system of claim 1, wherein

the sensor unit includes one or more current measurement sensors measuring current which leaks through the generator body of the remote plasma generator, and

the control unit generates another operating state information based on a leakage current measurement value measured by the current measurement sensor.

3. The remote plasma system of claim 1, wherein

the sensor unit includes a current transformer installed around a gas outlet of the remote plasma generator, and

the control unit generates another operating state information based on a current measurement value measured through the current transformer.

4. The remote plasma system of claim 1, wherein

the sensor unit includes a plasma measurement sensor measuring plasma generated in the generator body of the remote plasma generator, and

the control unit generates another operating state information of the remote plasma generator based on a plasma measurement value measured through the plasma measurement sensor.

5. The remote plasma system of claim 1, wherein

the sensor unit includes a plasma measurement sensor measuring a state of plasma that flows into the process chamber, and

the control unit generates process progress state information in the process chamber based on the plasma measurement value measured by the plasma measurement sensor.

6. The remote plasma system of claim 1, wherein

the sensor unit includes a plasma measurement sensor measuring a plasma state of exhaust gas which is exhausted from the process chamber, and

the control unit generates process progress state information in the process chamber based on a plasma measurement value measured by the plasma measurement sensor.

7. The remote plasma system of claim 1, wherein

the remote plasma generator includes:

a generator body having a plasma discharge space;

a transformer having a magnetic core and a primary wire wound to the magnetic core which are installed in the generator body so as to supply electromotive force for forming plasma to the plasma discharge space of the generator body; and

a power supply source supplying driving power to the primary wire of the transformer.

8. The remote plasma system of claim 7, further comprising:

a capacitively coupled electrode that is installed in the generator body so as to supply the electromotive force for forming the plasma to the plasma discharge space of the generator body and operates by receiving the driving power from the power supply source.

9. The remote plasma system of claim 7, further comprising:

an induction antenna coil that is installed in the generator body so as to supply the electromotive force for forming the plasma to the plasma discharge space of the generator body and operates by receiving the driving power from the power supply source.

10. The remote plasma system of claim 1, wherein

the remote plasma generator includes a metallic generator body having two or more divided regions divided into one or more insulation sections, and

the voltage measurement sensor includes two or more voltage measurement sensors installed in each of the two or more divided regions of the generator body.

11. The remote plasma system of claim 2, wherein

the remote plasma generator includes a metallic generator body having the plasma discharge space and two or more divided regions divided into one or more insulation sections, and

the current measurement sensor includes two or more current measurement sensors installed in the two or more divided regions of the generator body.

12. A self management method of a remote plasma system, comprising:

starting an operation of a remote plasma generator;

measuring voltage induced to a generator body of the remote plasma generator through a sensor unit including one or more voltage measurement sensors; and

generating operating state information of the remote plasma generator based on a voltage measurement value induced to the generator body of the remote plasma generator, which is measured by the sensor unit.

13. The self management method of claim 12, further comprising:

wherein the sensor unit includes a current measurement sensor measuring current which leaks through the generator body of the remote plasma generator,

generating another operating state information based on a leakage current measurement value measured by the current measurement sensor.

14. The self management method of claim 12, further comprising:

wherein the sensor unit includes a current transformer installed around a gas outlet of the remote plasma generator,

generating another operating state information based on a measurement value measured by the current transformer,

15. The self management method of claim 12, further comprising:

wherein the sensor unit includes a plasma measurement sensor measuring plasma, generated in the generator body of the remote plasma generator,

generating another operating state information based on a plasma measurement value measured by the plasma current measurement sensor.

16. The self management method of claim 12, further comprising:

wherein the sensor unit includes a plasma measurement sensor measuring a plasma state in the process chamber,

generating process progress state information in the process chamber based on a plasma measurement value measured by the plasma measurement sensor.

17. The self management method of claim 12, further comprising:

wherein the sensor unit includes a plasma measurement sensor measuring a plasma state of exhaust gas which is exhausted from the process chamber,

generating process progress state information in the process chamber based on a plasma measurement value measured by the plasma measurement sensor.