Capacitor, Mems Device, and Method of Manufacturing the Mems Device
First Claim
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1. A variable capacitor comprising a plurality of capacitor units connected to each other in parallel,wherein the capacitor unit comprises:
- a first capacitor;
a second capacitor connected to the first capacitor in parallel; and
a switch selectively connected to the first capacitor or the second capacitor.
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Abstract
Disclosed is a capacitor. The capacitor includes a plurality of capacitor units connected to each other in parallel. The capacitor unit includes a first capacitor, a second capacitor connected to the first capacitor in parallel, and a switch selectively connected to the first capacitor or the second capacitor.
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Citations
28 Claims
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1. A variable capacitor comprising a plurality of capacitor units connected to each other in parallel,
wherein the capacitor unit comprises: -
a first capacitor; a second capacitor connected to the first capacitor in parallel; and a switch selectively connected to the first capacitor or the second capacitor. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8)
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9. A capacitor comprising:
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a substrate; a third capacitor electrode on the substrate; a first capacitor electrode provided on the substrate while being spaced apart from the third capacitor electrode; a second capacitor electrode opposite to the first capacitor electrode while being spaced apart from the first capacitor electrode and the third capacitor electrode; a movable electrode between the first and second capacitor electrodes; and a driving electrode to move the movable electrode. - View Dependent Claims (10, 11, 12, 13, 14)
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15-24. -24. (canceled)
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25. A method of manufacturing a MEMS device, the method comprising:
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forming first and second electrodes spaced apart from each other on the substrate while being opposite to each other; forming a third electrode insulated from the first and second electrodes between the first and second electrodes; forming a movable electrode between the first and second electrodes; and forming a driving electrode to move the movable electrode. - View Dependent Claims (26, 27, 28)
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Specification