Capacitor, Mems Device, and Method of Manufacturing the Mems Device

• US 20140347781A1
• Filed: 10/10/2012
• Published: 11/27/2014
• Est. Priority Date: 12/20/2011
• Status: Active Grant

• Current Assignee: LG Innotek Company Limited (LG Corporation)
• Original Assignee: LG Innotek Company Limited (LG Corporation)
• Inventors: Ji, Chil Young
• Granted Patent: US 9,548,162 B2
• Time in Patent Office: Days
• US Class Current: 361/290
• CPC Class Codes: H01G 5/16 using variation of distance between electrodes
• CPC Class Codes: H01G 5/38 Multiple capacitors, e.g. ganged
• CPC Class Codes: H01L 27/016 Thin-film circuits
• CPC Class Codes: H01L 28/40 Capacitors
• CPC Class Codes: Y10T 29/43 Electric condenser making

Abstract

Disclosed is a capacitor. The capacitor includes a plurality of capacitor units connected to each other in parallel. The capacitor unit includes a first capacitor, a second capacitor connected to the first capacitor in parallel, and a switch selectively connected to the first capacitor or the second capacitor.

Claims

1. A variable capacitor comprising a plurality of capacitor units connected to each other in parallel,

wherein the capacitor unit comprises:

a first capacitor;

a second capacitor connected to the first capacitor in parallel; and

a switch selectively connected to the first capacitor or the second capacitor.

2. The variable capacitor of claim 1, further comprising an input terminal and an output terminal connected to the capacitor units,

wherein the switch selectively connects the first capacitor or the second capacitor to the input terminal, or selectively connects the first capacitor or the second capacitor to the output terminal.

3. The variable capacitor of claim 1, wherein each of the first and second capacitors has a capacitance in a range of 50 fF to 150 fF.

4. The variable capacitor of claim 1, wherein a capacitance of the first capacitor is different from a capacitance of the second capacitor.

5. The variable capacitor of claim 1, wherein each capacitor unit comprises:

a substrate;

a movable electrode on the substrate; and

a driving electrode to drive the movable electrode.

6. The variable capacitor of claim 5, wherein the movable electrode has a ball shape.

7. The variable capacitor of claim 5, wherein each capacitor unit comprises:

a first capacitor electrode forming a first capacitance together with the movable electrode; and

a second capacitor electrode forming a second capacitance together with the movable electrode.

8. The variable capacitor of claim 7, wherein the capacitor unit further comprises a connection electrode connected to the movable electrode.

9. A capacitor comprising:

a substrate;

a third capacitor electrode on the substrate;

a first capacitor electrode provided on the substrate while being spaced apart from the third capacitor electrode;

a second capacitor electrode opposite to the first capacitor electrode while being spaced apart from the first capacitor electrode and the third capacitor electrode;

a movable electrode between the first and second capacitor electrodes; and

a driving electrode to move the movable electrode.

10. The capacitor of claim 9, further comprising:

a first dielectric member between the first capacitor electrode and the movable electrode; and

a second dielectric member between the first capacitor electrode and the movable electrode.

11. The capacitor of claim 10, wherein a thickness of the first dielectric member is different from a thickness of the second dielectric member.

12. The capacitor of claim 11, further comprising a third dielectric member interposed between the third capacitor electrode and the movable electrode.

13. The capacitor of claim 9, wherein the driving electrode comprises:

a first driving electrode adjacent to the first capacitor electrode; and

a second driving electrode adjacent to the second capacitor electrode.

14. The capacitor of claim 9, wherein the driving electrode is aligned in line with the third capacitor electrode.

15-24. -24. (canceled)

25. A method of manufacturing a MEMS device, the method comprising:

forming first and second electrodes spaced apart from each other on the substrate while being opposite to each other;

forming a third electrode insulated from the first and second electrodes between the first and second electrodes;

forming a movable electrode between the first and second electrodes; and

forming a driving electrode to move the movable electrode.

26. The method of claim 25, wherein the third electrode is formed simultaneously with the driving electrode.

27. The method of claim 25, further comprising:

forming a first dielectric member at a lateral side of the first electrode; and

forming a second dielectric member at a lateral side of the second electrode.

28. The method of claim 27, further comprising forming a third dielectric member on a top surface of the third electrode.