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ADAPTER FOR VACUUM PUMPS AND ASSOCIATED PUMPING DEVICE

  • US 20140348634A1
  • Filed: 12/20/2012
  • Published: 11/27/2014
  • Est. Priority Date: 12/26/2011
  • Status: Active Grant
First Claim
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1. An adapter for vacuum pumps, characterized in that it comprises an annular inlet flange (15) intended to be coupled to an outlet orifice of a chamber and an outlet coupling (16) comprising at least two cylindrical outlet through-housings (21) and forming an at least partial pump casing for the case (4) of a respective turbomolecular vacuum pump (3), said turbomolecular vacuum pumps (3) being intended to be accommodated in a respective cylindrical outlet housing (21).

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