MEMS Device and Electronic Device Having Projector Function

• US 20140355089A1
• Filed: 01/08/2013
• Published: 12/04/2014
• Est. Priority Date: 02/03/2012
• Status: Active Grant

• Current Assignee: Funai Electric Co., Ltd.
• Original Assignee: Funai Electric Co., Ltd.
• Inventors: Murayama, Manabu, Kugo, Kouichi, Inoue, Naoki, Fujii, Hitoshi
• Granted Patent: US 10,018,833 B2
• Time in Patent Office: Days
• US Class Current: 359/199.4
• CPC Class Codes: B81B 2201/042 Micromirrors, not used as optical switches
• CPC Class Codes: B81B 3/0062 Devices moving in two or more dimensions, i.e. having special features which allow movement in more than one dimension
• CPC Class Codes: G02B 26/0833 the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD G02B26/0825 takes precedence; micromechanical devices in general B81B
• CPC Class Codes: G02B 26/0841 the reflecting element being moved or deformed by electrostatic means
• CPC Class Codes: G02B 26/0858 the reflecting means being moved or deformed by piezoelectric means
• CPC Class Codes: G02B 26/101 with both horizontal and vertical deflecting means, e.g. raster or XY scanners colour television using laser beams scanning a display screen H04N9/3129
• CPC Class Codes: G02B 26/105 with one or more pivoting mirrors or galvano-mirrors G02B26/101 takes precedence
• CPC Class Codes: G02B 27/646 compensating for small deviations, e.g. due to vibration or shake movement of one or more optical elements for control of motion blur in cameras, projectors or printers G03B2205/0007; image stabilisation in cameras peculiar to the presence or use of an electronic image sensor H04N23/68

Abstract

In a MEMS device (1), a first drive portion (40) is divided into a first drive section (41) and a second drive section (42). A second drive portion (50) is divided into a third drive section (51) and a fourth drive section (52). The first drive section, the second drive section, the third drive section, and the fourth drive section are controlled for driving independently of each other to incline an optical component (10).

Claims

1. A MEMS device (1) comprising:

an optical component (10); and

a drive portion (21, 22) including a drive unit (30) having a first drive portion (40) and a second drive portion (50) extending in a first direction, arranged along a second direction substantially orthogonal to the first direction and a first connecting portion (60) connecting the first drive portion to the second drive portion, configured to incline the optical component, wherein

the first drive portion is divided into a first drive section (41) on a first side in the first direction and a second drive section (42) on a second side in the first direction,

the second drive portion is divided into a third drive section (51) on the second side in the first direction connected to the second drive section through the first connecting portion and a fourth drive section (52) on the first side in the first direction,

the first drive section, the second drive section, the third drive section, and the fourth drive section are configured to be controlled for driving independently of each other, and

the first drive section, the second drive section, the third drive section, and the fourth drive section are controlled for driving independently of each other to incline the optical component.

2. The MEMS device according to claim 1, wherein

the first drive section, the second drive section, the third drive section, and the fourth drive section are controlled for driving independently of each other to incline the optical component in a biaxial direction about a first rotation axis line and a second rotation axis line extending in the first direction and the second direction substantially orthogonal to each other in a same plane, respectively.

3. The MEMS device according to claim 2, wherein

the first drive section and the second drive section are controlled for driving substantially in a same manner and the third drive section and the fourth drive section are controlled for driving substantially in a same manner to incline the optical component about the first rotation axis line.

4. The MEMS device according to claim 2, wherein

the first drive section and the third drive section are controlled for driving substantially in a same manner and the second drive section and the fourth drive section are controlled for driving substantially in a same manner to incline the optical component about the second rotation axis line.

5. The MEMS device according to claim 2, wherein

the first drive section and the second drive section are controlled for driving substantially in a same manner and the third drive section and the fourth drive section are controlled for driving substantially in a same manner to incline the optical component about the first rotation axis line,

the first drive section and the third drive section are controlled for driving substantially in a same manner and the second drive section and the fourth drive section are controlled for driving substantially in a same manner to incline the optical component about the second rotation axis line, and

in the first drive section, the second drive section, the third drive section, and the fourth drive section, drive control about the first rotation axis line and drive control about the second rotation axis line are combined to incline the optical component in the biaxial direction about the first rotation axis line and the second rotation axis line.

6. The MEMS device according to claim 1, wherein

the first drive portion is divided into the first drive section and the second drive section in a vicinity of a central portion of the first drive portion in the first direction, and

the second drive portion is divided into the third drive section and the fourth drive section in a vicinity of a central portion of the second drive portion in the first direction.

7. The MEMS device according to claim 6, wherein

the first drive section and the second drive section of the first drive portion are formed to have a substantially same length in the first direction, and

the third drive section and the fourth drive section of the second drive portion are formed to have a substantially same length in the first direction.

8. The MEMS device according to claim 1, wherein

the first drive section and the second drive section of the first drive portion are formed in a state where the first drive section and the second drive section are separated from each other by a first distance in the first direction,

the third drive section and the fourth drive section of the second drive portion are formed in a state where the third drive section and the fourth drive section are separated from each other by a second distance in the first direction, and

the first distance and the second distance are smaller than a width of the first drive portion in the second direction and a width of the second drive portion in the second direction, respectively.

9. The MEMS device according to claim 1, wherein

a pair of the drive portions are provided to hold the optical component therebetween, and

the pair of drive portions are formed to be substantially point-symmetric to each other, using a substantially central portion of the optical component as a symmetry center.

10. The MEMS device according to claim 9, wherein

the pair of drive portions substantially point-symmetric to each other are controlled for driving in a different manner.

11. The MEMS device according to claim 1, wherein

a plurality of the drive units are arranged along the second direction, and

the drive portion further includes a second connecting portion (31) connecting the first drive section of the drive unit to the fourth drive section of the drive unit that is adjacent and is formed to meander by connection of the plurality of drive units.

12. The MEMS device according to claim 1, wherein

the first drive section, the second drive section, the third drive section, and the fourth drive section are configured to be driven by deformation of a piezoelectric body (44) resulting from voltage application to the piezoelectric body and have a first drive electrode (41a), a second drive electrode (42a), a third drive electrode (51a), and a fourth drive electrode (52a), respectively, and

the first drive section, the second drive section, the third drive section, and the fourth drive section are controlled for driving independently of each other by application of voltages different from each other to the first drive electrode, the second drive electrode, the third drive electrode, and the fourth drive electrode.

13. The MEMS device according to claim 12, further comprising:

a movable portion (16) where the optical component is arranged, connected to a first end of the drive portion; and

a fixing portion (23) fixing a second end of the drive portion, wherein

the drive portion further includes a detection electrode (381a, 382a) capable of detecting driving of the drive portion based on deformation of the piezoelectric body, and

the detection electrode is provided in the drive unit located at the second end of the drive portion fixed to the fixing portion.

14. The MEMS device according to claim 1, further comprising:

a movable portion (226) where the optical component is arranged, connected to a first end of the drive portion;

a fixing portion (223) fixing a second end of the drive portion; and

a spacer (270) configured to provide the optical component in a stacked arrangement in the movable portion in a state where the optical component and the drive portion are separated from each other in a third direction substantially orthogonal to the first direction and the second direction.

15. The MEMS device according to claim 1, wherein

the optical component is configured to be resonantly driven, and the drive portion is configured to perform non-resonant drive.

16. An electronic device having a projector function (100), comprising:

a laser beam generation portion (104, 105, 106) emitting a laser beam;

a control portion (102) analyzing an input picture and recognizing pixel information; and

a laser scanning portion (1) including a MEMS device (1) scanning the laser beam, wherein

the MEMS device includes;

an optical component (10) capable of scanning the laser beam, and

a drive portion (21, 22) including a drive unit (30) having a first drive portion (40) and a second drive portion (50) extending in a first direction, arranged along a second direction substantially orthogonal to the first direction and a first connecting portion (60) connecting the first drive portion to the second drive portion, configured to incline the optical component,

the first drive portion is divided into a first drive section (41) on a first side in the first direction and a second drive section (42) on a second side in the first direction,

the second drive portion is divided into a third drive section (51) on the second side in the first direction connected to the second drive section through the first connecting portion and a fourth drive section (52) on the first side in the first direction,

the first drive section, the second drive section, the third drive section, and the fourth drive section are configured to be controlled for driving independently of each other, and

the first drive section, the second drive section, the third drive section, and the fourth drive section are controlled for driving independently of each other to incline the optical component.

17. The electronic device having a projector function according to claim 16, further comprising a vibration detecting portion capable of detecting vibration of the electronic device, wherein

the control portion is configured to correct a shake by performing control of inclining the optical component of the MEMS device on the basis of the vibration of the electronic device resulting from the shake detected by the vibration detecting portion.

18. The electronic device having a projector function according to claim 16, wherein

the first drive section, the second drive section, the third drive section, and the fourth drive section are controlled for driving independently of each other to incline the optical component in a biaxial direction about a first rotation axis line and a second rotation axis line extending in the first direction and the second direction substantially orthogonal to each other in a same plane, respectively.

19. The electronic device having a projector function according to claim 18, wherein

the first drive section and the second drive section are controlled for driving substantially in a same manner and the third drive section and the fourth drive section are controlled for driving substantially in a same manner to incline the optical component about the first rotation axis line.

20. The electronic device having a projector function according to claim 18, wherein

the first drive section and the third drive section are controlled for driving substantially in a same manner and the second drive section and the fourth drive section are controlled for driving substantially in a same manner to incline the optical component about the second rotation axis line.