INTERFEROMETER SYSTEM AND METHOD TO GENERATE AN INTERFERENCE SIGNAL OF A SURFACE OF A SAMPLE

• US 20140362383A1
• Filed: 05/30/2014
• Published: 12/11/2014
• Est. Priority Date: 06/10/2013
• Status: Abandoned Application

• Current Assignee: Mitutoyo Corporation
• Original Assignee: Mitutoyo Corporation
• Inventors: QUAEDACKERS, Johannes Anna, HAITJEMA, Han, ZUIDERWEG, Adriaan Tiemen
• Application Number:
  US14/291,710
• Publication Number:
  US 20140362383A1
• Time in Patent Office: Days
• US Class Current: 356/450
• CPC Class Codes: G01B 9/02012 using temporal intensity variation
• CPC Class Codes: G01B 9/02067 by electronic control systems, i.e. using feedback acting on optics or light
• CPC Class Codes: G01B 9/0209 Low-coherence interferometers
• CPC Class Codes: G01J 1/02 Details
• CPC Class Codes: G02B 27/10 Beam splitting or combining systems polarising systems G02B27/28; mixing and splitting light signals using optical waveguides G02B6/28; beam shaping, e.g. changing the cross-sectional area, by dividing or superposing multiple light beams G02B27/0905
• CPC Class Codes: G02B 27/283 used for beam splitting or combining

Abstract

An interferometer system to generate an interference signal of a surface of a sample includes a broadband illuminator to provide a broadband illumination beam, a beam splitter to split the broadband illumination beam in a reference beam for reflection on a reference reflector and a measurement beam for reflection on the surface of the sample, and a detector to receive an interference radiation intensity created between the reference beam reflected from the reference reflector and the reflected measurement beam from the surface of the sample to generate an interference signal. The interferometer system having a continuous variable broadband reflector in the beam splitter and/or the reference reflector to adjust the broadband radiation intensity balance between the measurement beam and the reference beam.

Claims

1. An interferometer system to generate an interference signal of a surface of a sample comprising:

a broadband illuminator configured to provide a broadband illumination beam;

a beam splitter configured to split the broadband illumination beam into a reference beam for reflection on a reference reflector and into a measurement beam for reflection on the surface of the sample;

a detector configured to receive an interference radiation intensity created between the reference beam reflected from the reference reflector and the reflected measurement beam from the surface of the sample to generate an interference signal; and

a continuous variable broadband reflector in at least one of the beam splitter and the reference reflector and configured to adjust the broadband radiation intensity balance between the measurement beam and the reference beam.

2. The interferometer system according to claim 1, further comprising a balance adjuster configured to:

adjust the reflectivity of the continuous variable broadband reflector,

adjust the broadband radiation intensity balance between the measurement beam and the reference beam, and

optimize the interference radiation intensity.

3. The interferometer system according to claim 1, wherein the continuous variable broadband reflector comprises a first and second polarizer, wherein one of the first and second polarizer comprises an adjustable continuous variable polarization configured to adjust the polarization of the one of the first and second polarizer with respect to the other of the first and second polarizer, such that the reflectivity of the continuous variable broadband reflector is adjusted.

4. The interferometer system according to claim 3, wherein the one of the first and second polarizer with the adjustable continuous variable polarization comprises a liquid crystal with an electrically adjustable polarization.

5. The interferometer system according to claim 1, wherein the continuous variable broadband reflector comprises:

a metal reflector which is reflective in the metallic state while the hydride form of the metal reflector is transmissive for the broadband radiation, and

a source of at least one of hydrogen and protons to provide hydrogen to the metal reflector so as to adjust the reflectivity of the metal reflector.

6. The interferometer system according to claim 5, wherein the metal reflector comprises at least one of a rare earth metal, a transition metal, and a metal alloy.

7. The interferometer system according to claim 5, wherein:

the continuous variable broadband reflector comprises a housing configured to create a gas-controlled environment for the metal reflector, and

the interferometer system further comprises a hydrogen gas supply configured to control the hydrogen concentration in the housing such that the reflectivity of the metal reflector is adjusted.

8. The interferometer system according to claim 7, wherein the hydrogen gas supply comprises a hydrolysis cell for the production of hydrogen for the gas controlled environment from water.

9. The interferometer system according to claim 5, wherein the continuous variable broadband reflector comprises a proton donor layer and a connection for a power source to provide an electric potential difference between the metal reflector and the proton donor layer to transfer the protons from the proton donor layer to the metal reflector to provide hydrogen to the metal reflector and increasing the transmission of the metal reflector.

10. The system according to claim 9, wherein the power source is configured to reverse the electric potential difference between the metal reflector and the proton donor layer such that the protons are transferred from the metal reflector to the proton donor layer, and such that the reflectivity of the metal reflector is increased.

11. The interferometer system according to claim 9, wherein the proton donor layer comprises H_xWO₃.

12. The interferometer system according to claim 9, wherein the continuous variable broadband reflector comprises a proton transmissible material between the proton donor layer and the metal reflector.

13. The interferometer system according to claim 1, further comprising:

a scanner configured to optically scan the surface of the sample and the reference reflector in the direction of the surface of the sample over a scanning distance while measuring the scanning distance and generating a scanning distance signal; and

,

a processor configured to receive the interference signal representing the interference radiation intensity during the scan from the detector and the distance signal from the scanner and combining both to form a correlogram displaying an interference radiation intensity as a function of the scanning distance.

14. The interferometer system according to claim 1, wherein the continuous variable broadband reflector comprises:

a temperature-dependent reflector which reflectivity is dependent on the temperature; and

,

a temperature adjuster configured to adjust the temperature of the temperature dependent reflector to adjust the reflectivity of the temperature dependent reflector.

15. A method to generate an interference signal of a surface of a sample with an interferometer system, the method comprising:

providing a broadband illumination beam;

splitting, by a beam splitter, the illumination beam into a reference beam for reflection on a reference reflector and into a measurement beam for reflection on the surface of the sample;

receiving an interference radiation intensity created between the reference beam reflected from the reference reflector and the reflected measurement beam from the surface of the sample on a detector creating an interference signal;

adjusting the broadband radiation intensity balance between the measurement beam and the reference beam with a continuous variable broadband reflector in at least one of the beam splitter and the reference reflector.