Die Stack with Optical TSVs

• US 20140363172A1
• Filed: 06/10/2013
• Published: 12/11/2014
• Est. Priority Date: 06/10/2013
• Status: Active Grant

• Current Assignee: NXP USA, Inc. (NXP Semiconductors NV)
• Original Assignee: Freescale Semiconductor, Inc. (NXP Semiconductors NV)
• Inventors: Pelley, Perry H., Stephens, Tab A., McShane, Michael B.
• Granted Patent: US 9,094,135 B2
• Time in Patent Office: Days
• US Class Current: 398/141
• CPC Class Codes: G02B 6/12002 Three-dimensional structures
• CPC Class Codes: G02B 6/3556 NxM switch, i.e. regular arrays of switches elements of matrix type constellation
• CPC Class Codes: H04B 10/801 using optical interconnects, e.g. light coupled isolators, circuit board interconnections

Abstract

A high density, low power, high performance information system, method and apparatus are described in which a laser source (213) on a first die (210) generates a source light beam of unmodulated monochromatic coherent light (281) for distribution via optical beam routing structures (e.g., 214/214a, 224/224a, 234/234a) to a plurality of receiving die (220, 230), each of which includes its own modulator (e.g., 223, 233) for optically receiving at least a portion of the source light beam (281a, 281b) from the first die and generating therefrom an output source light beam of modulated monochromatic coherent light (291, 292) which is encoded at said modulator in response to electrical signal information.

Claims

1. An apparatus comprising:

a first die comprising;

a laser source for generating a source unmodulated optical beam, and

one or more first optical beam routing structures for optically transmitting the source unmodulated optical beam through the first die; and

at least one receiving die comprising;

one or more second optical beam routing structures for optically receiving at least a portion of the source unmodulated optical beam from the one or more first optical beam routing structures,

a modulator for generating an output modulated optical beam which is encoded at said modulator in response to electrical signal information, and

one or more third optical beam routing structures for optically transmitting the output modulated optical beam signal through the receiving die.

2. The apparatus of claim 1, where the first die comprises a processor die, and where the receiving die comprises a memory die.

3. The apparatus of claim 1, where the first die and receiving die are attached together in a die stack module.

4. The apparatus of claim 3, where the one or more first optical beam routing structures comprise:

a first optical beam waveguide for receiving the source unmodulated optical beam from the laser source; and

a first optical mirror structure for receiving the source unmodulated optical beam from the first optical beam waveguide and deflecting the source unmodulated optical beam as a deflected source unmodulated optical beam toward the receiving die.

5. The apparatus of claim 4, where the first optical mirror structure comprises an angled interface deflection surface that is offset by 45 degrees from the lateral plane of the first die for perpendicularly deflecting the source unmodulated optical beam.

6. The apparatus of claim 4, where the one or more second optical beam routing structures on the receiving die comprise:

a second optical through silicon via structure for receiving the deflected source unmodulated optical beam from the first die;

a second optical mirror structure for deflecting the deflected source unmodulated optical beam from the second optical through silicon via structure as a second deflected source unmodulated optical beam toward a modulator on the receiving die; and

a second optical beam waveguide for transmitting the second deflected source unmodulated optical beam to the modulator on the receiving die.

7. The apparatus of claim 6, where the one or more third optical beam routing structures on the receiving die comprise:

a third optical beam waveguide for receiving the modulated optical beam signal from the modulator on the receiving die; and

a third optical mirror structure for receiving the output modulated beam signal from the third optical beam waveguide and deflecting the output modulated optical beam signal toward the first die.

8. The apparatus of claim 1, where the first die and at least one receiving die comprise a first die and a plurality of receiving die attached in a die stack.

9. The apparatus of claim 8, further comprising a plurality of non-intersecting optical beam output routing structures for optically routing the output modulated optical beam signal from each receiving die to the first die.

10. The apparatus of claim 8, where the die stack is at least partially encapsulated by a packaging structure formed with mold compound.

11. The apparatus of claim 10, where the packaging structure is formed with a transparent mold compound.

12. The apparatus of claim 10, where the packaging structure comprises a transparent layer formed in the mold compound to provide a transparent output optical signal path from the packaging structure for an output modulated optical beam signal generated by the receiving die.

13. A method, comprising:

generating an unmodulated laser source light beam at a first die in a die stack;

transmitting the unmodulated source light beam to a modulator located at a receiving die in the die stack using one or more optical routing structures formed in the die stack; and

generating an information-modulated optical signal from the unmodulated source light beam at one of the one or more modulators based on electrical signal information provided to said one of the one or more modulators.

14. The method of claim 13, where generating the unmodulated source light beam signal comprises generating a source light beam of unmodulated monochromatic coherent light at a laser source formed in the first die.

15. The method of claim 13, where transmitting the unmodulated source light beam comprises transmitting the unmodulated laser source light beam through one or more optical beam waveguides, optical through silicon via structures, and optical mirror structures formed in the die stack to route the unmodulated source light beam from the first die to the modulator located at the receiving die.

16. The method of claim 13, where generating the information-modulated optical beam signal comprises generating the information-modulated optical beam signal based on electrical signal information produced by the receiving die in the die stack.

17. The method of claim 13, further comprising transmitting one or more information-modulated optical beam signals from the modulator to the first die using one or more output optical routing structures formed in the die stack.

18. The method of claim 17, where transmitting one or more information-modulated optical signals comprises transmitting one or more information-modulated optical beam signals through one or more output optical beam waveguides, output optical through silicon via structures, and output optical mirror structures formed in the die stack to route the one or more information-modulated optical signals to the first die.

19. The method of claim 13, further comprising transmitting one or more information-modulated optical beam signals from the one or more modulators through a packaging structure formed to at least partially encapsulate the die stack.

20. A stacked die device, comprising:

an optical source die electrically connected to the conductor array and attached to the system board, comprising a laser source for generating an unmodulated source light beam and one or more optical routing structures for optically transmitting the unmodulated source light beam through the optical source die; and

a second die connected and attached to the optical source die in a die stack, the second die comprising;

a modulator for generating an information-modulated optical signal from the unmodulated source light beam based on electrical signal information provided to said modulator, and

one or more optical routing structures for optically receiving the unmodulated source light beam from the optical source die and transmitting the received unmodulated source light beam to the modulator; and

a packaging structure attached to the substrate board that at least partially encapsulates the optical source die and the second die formed in a die stack.