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CRYOPUMP

  • US 20140366562A1
  • Filed: 06/11/2014
  • Published: 12/18/2014
  • Est. Priority Date: 06/14/2013
  • Status: Active Grant
First Claim
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1. A cryopump comprising:

  • a refrigerator comprising a first stage and a second stage cooled to a lower temperature than that of the first stage;

    a first cryopanel comprising a radiation shield having a main opening and an inlet cryopanel disposed at the main opening, the first cryopanel thermally connected to the first stage; and

    a second cryopanel enclosed by the first cryopanel and thermally connected to the second stage, whereinthe radiation shield comprises an attaching pedestal located lateral to the second cryopanel for attachment of the refrigerator to the radiation shield, and a shield portion adjacent to the attaching pedestal and enclosing the second cryopanel, whereinbetween the second cryopanel and the attaching pedestal is formed a lateral gap, and between the second cryopanel and the shield portion is formed a gap part continuing into the lateral gap, and whereinthe second cryopanel is shaped and/or located such that the lateral gap is comparable in width to the gap part.

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