OPTICAL REFLECTING ELEMENT AND ACTUATOR

• US 20140368896A1
• Filed: 03/11/2013
• Published: 12/18/2014
• Est. Priority Date: 03/15/2012
• Status: Active Grant

• Current Assignee: Panasonic Intellectual Property Management Co., Ltd. (Panasonic Holdings Corporation)
• Original Assignee: Panasonic Corporation (Panasonic Holdings Corporation)
• Inventors: Nakazono, Shinsuke, Kurozuka, Akira, Yamamoto, Yuta, Komaki, Kazuki
• Granted Patent: US 9,329,384 B2
• Time in Patent Office: Days
• US Class Current: 359/198.1
• CPC Class Codes: G02B 26/0858 the reflecting means being moved or deformed by piezoelectric means
• CPC Class Codes: G02B 26/101 with both horizontal and vertical deflecting means, e.g. raster or XY scanners colour television using laser beams scanning a display screen H04N9/3129
• CPC Class Codes: G02B 26/105 with one or more pivoting mirrors or galvano-mirrors G02B26/101 takes precedence
• CPC Class Codes: H04N 1/113 using oscillating or rotating mirrors

Abstract

An optical reflecting device includes a movable plate having a reflecting surface, a first support portion, a first drive part, a first frame, and a monitor part for detecting the rotation of the movable plate. The first support portion is connected to the movable plate. The first drive part is formed in the first support portion and rotates the movable plate about a first axis. The first frame contains the movable plate and the first support portion, and is connected to the first support portion. The monitor part extends from that portion of the outer periphery of the movable plate which is most distant from the first axis.

Claims

1. An optical reflecting device comprising:

a movable plate having a reflecting surface;

a first support portion connected to the movable plate;

a first drive part provided on the first support portion and capable of rotating the movable plate about a first axis;

a first frame connected to the first support portion and containing the movable plate and the first support portion; and

a monitor part extending from a portion, which is most distant from the first axis, of an outer periphery of the movable plate, and capable of detecting rotation of the movable plate.

2. The optical reflecting device according to claim 1, wherein the movable plate includes:

a mirror part;

a second support portion connected to the mirror part;

a second drive part provided on the second support portion and rotating the mirror part about a second axis substantially orthogonal to the first axis; and

a second frame containing the mirror part and the second support portion and being connected to the second support portion at an inside of the second frame and connected to the first support portion at an outside of the second frame.

3. The optical reflecting device according to claim 2, wherein each of the first and second support portions has a meandering shape.

4. The optical reflecting device according to claim 1, wherein the first support portion has a meandering shape.

5. The optical reflecting device according to claim 1, wherein the monitor part includes a lower electrode, an upper electrode, and a piezoelectric body interposed between the lower electrode and the upper electrode.

6. The optical reflecting device according to claim 1, wherein the monitor part is a strain resistance element.

7. An actuator comprising:

a movable plate;

a first support portion connected to the movable plate;

a first drive part provided on the first support portion and capable of rotating the movable plate about a first axis;

a first frame connected to the first support portion; and

a monitor part extending from a portion, which is most distant from the first axis, of an outer periphery of the movable plate, and capable of detecting rotation of the movable plate.

8. The actuator according to claim 7, wherein the monitor part includes a lower electrode, an upper electrode, and a piezoelectric body interposed between the lower electrode and the upper electrode.

9. The actuator according to claim 7, wherein the monitor part is a strain resistance element.