OPTICAL REFLECTING ELEMENT AND ACTUATOR
First Claim
Patent Images
1. An optical reflecting device comprising:
- a movable plate having a reflecting surface;
a first support portion connected to the movable plate;
a first drive part provided on the first support portion and capable of rotating the movable plate about a first axis;
a first frame connected to the first support portion and containing the movable plate and the first support portion; and
a monitor part extending from a portion, which is most distant from the first axis, of an outer periphery of the movable plate, and capable of detecting rotation of the movable plate.
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Abstract
An optical reflecting device includes a movable plate having a reflecting surface, a first support portion, a first drive part, a first frame, and a monitor part for detecting the rotation of the movable plate. The first support portion is connected to the movable plate. The first drive part is formed in the first support portion and rotates the movable plate about a first axis. The first frame contains the movable plate and the first support portion, and is connected to the first support portion. The monitor part extends from that portion of the outer periphery of the movable plate which is most distant from the first axis.
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Citations
9 Claims
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1. An optical reflecting device comprising:
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a movable plate having a reflecting surface; a first support portion connected to the movable plate; a first drive part provided on the first support portion and capable of rotating the movable plate about a first axis; a first frame connected to the first support portion and containing the movable plate and the first support portion; and a monitor part extending from a portion, which is most distant from the first axis, of an outer periphery of the movable plate, and capable of detecting rotation of the movable plate. - View Dependent Claims (2, 3, 4, 5, 6)
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7. An actuator comprising:
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a movable plate; a first support portion connected to the movable plate; a first drive part provided on the first support portion and capable of rotating the movable plate about a first axis; a first frame connected to the first support portion; and a monitor part extending from a portion, which is most distant from the first axis, of an outer periphery of the movable plate, and capable of detecting rotation of the movable plate. - View Dependent Claims (8, 9)
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Specification