INERTIAL FORCE SENSOR
First Claim
1. An inertial force sensor comprisinga detector element including:
- a first beam;
a second beam parallel with the first beam;
a third beam, a fourth beam, a fifth beam, and a sixth beam which connect between the first beam and the second beam;
a seventh beam connected to the fourth beam and extending in parallel with the first beam; and
a eighth beam connected to the fifth beam and extending in parallel with the first beam,wherein a first slit is provided between the third beam and the fourth beam,wherein a second slit is provided between the fifth beam and the sixth beam,wherein a width of the fourth beam is smaller than a width of the first beam,wherein a width of the fifth beam is smaller than a width of the second beam,wherein a width of the third beam is larger than the width of the fourth beam and larger than a width of the first slit,wherein a width of the sixth beam is larger than the width of the fifth beam and larger than a width of the second slit,
0 Assignments
0 Petitions
Accused Products
Abstract
An inertial force sensor includes a detector element, a supporting body supporting the detector element, and a case holding the detector element via the first supporting body. The supporting body has flexibility and has a plate shape. The detector element includes a weight, a flexible coupling portion extending along a plane and supporting the weight, a fixing portion holding the weight via the coupling portion, and a detector detecting angular velocities about at least two axes non-parallel to each other. The supporting body extends in parallel with the plane from the detector element, and bends at a bending portion in a direction away from the plane. This inertial force sensor can detect the angular velocities while preventing erroneous detection caused by external impacts and vibrations.
-
Citations
11 Claims
-
1. An inertial force sensor comprising
a detector element including: -
a first beam; a second beam parallel with the first beam; a third beam, a fourth beam, a fifth beam, and a sixth beam which connect between the first beam and the second beam; a seventh beam connected to the fourth beam and extending in parallel with the first beam; and a eighth beam connected to the fifth beam and extending in parallel with the first beam, wherein a first slit is provided between the third beam and the fourth beam, wherein a second slit is provided between the fifth beam and the sixth beam, wherein a width of the fourth beam is smaller than a width of the first beam, wherein a width of the fifth beam is smaller than a width of the second beam, wherein a width of the third beam is larger than the width of the fourth beam and larger than a width of the first slit, wherein a width of the sixth beam is larger than the width of the fifth beam and larger than a width of the second slit, - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11)
-
Specification