×

ANGULAR RATE SENSOR WITH QUADRATURE ERROR COMPENSATION

  • US 20140374849A1
  • Filed: 06/24/2013
  • Published: 12/25/2014
  • Est. Priority Date: 06/24/2013
  • Status: Active Grant
First Claim
Patent Images

1. An angular rate sensor comprising:

  • a substrate;

    a drive mass flexibly coupled to said substrate;

    a sense mass suspended above said substrate and flexibly coupled to said drive mass via flexible support elements; and

    an electrode structure coupled to said drive mass and spaced apart from said substrate, said electrode structure being configured to produce a sense signal that indicates movement of said sense mass relative to said electrode structure.

View all claims
  • 32 Assignments
Timeline View
Assignment View
    ×
    ×