Controlled Buckling Structures in Semiconductor Interconnects and Nanomembranes for Stretchable Electronics
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Abstract
In an aspect, the present invention provides stretchable, and optionally printable, components such as semiconductors and electronic circuits capable of providing good performance when stretched, compressed, flexed or otherwise deformed, and related methods of making or tuning such stretchable components. Stretchable semiconductors and electronic circuits preferred for some applications are flexible, in addition to being stretchable, and thus are capable of significant elongation, flexing, bending or other deformation along one or more axes. Further, stretchable semiconductors and electronic circuits of the present invention are adapted to a wide range of device configurations to provide fully flexible electronic and optoelectronic devices.
102 Citations
30 Claims
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1. (canceled)
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2. A flexible multilayer device comprising:
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a flexible substrate; an intermediate layer that is at least partially supported on a surface of the flexible substrate; a first device layer disposed over the flexible substrate and at least partially embedded in the intermediate layer, the first device layer comprising; a first device component; and at least one first stretchable semiconductor structure; an interlayer disposed over the first device layer, the interlayer comprising a polymeric material; a second device layer disposed over the interlayer, the second device layer comprising a second device component; and an electrical interconnect having a first end and the second end, the electrical interconnect extending through a portion of the interlayer, wherein the first end of the interlayer is in electrical communication with the first device component, and wherein the second end of the interlayer is in electrical communication with the second device component. - View Dependent Claims (3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16, 17, 18)
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19. A flexible multilayer device comprising:
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a flexible substrate; an intermediate layer that is at least partially supported on a surface of the flexible substrate; a first device layer disposed over the flexible substrate and at least partially embedded in the intermediate layer, the first device layer comprising; a first device component; and at least two first stretchable semiconductor structures, wherein the at least two first stretchable semiconductor structures extend along at least two different directions from the first device component in a plane of the first device layer to form a two-dimensional array; an interlayer disposed over the first device layer, the interlayer comprising a polymeric material; a second device layer disposed over the interlayer, the second device layer comprising a second device component; and an electrical interconnect having a first end and the second end, the electrical interconnect extending through a portion of the interlayer, wherein the first end of the interlayer is in electrical communication with the first device component, and wherein the second end of the interlayer is in electrical communication with the second device component. - View Dependent Claims (20, 21, 22, 23, 24, 25, 26, 27)
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28. A method for making a multilayer device, said method comprising the steps of:
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providing a substrate pre-patterned with one or more device components supported by a receiving surface of the substrate; assembling a first set of printable semiconductor elements on said substrate by contact printing said printable semiconductor elements onto said receiving surface of the substrate or one or more structures provided thereon, thereby generating a first device layer; providing an interlayer on said first set of printable semiconductor elements, said interlayer having a receiving surface; and assembling a second set of printable semiconductor elements on said interlayer by contact printing said printable semiconductor elements onto said receiving surface of the interlayer or one or more structures provided thereon, thereby generating a second device layer. - View Dependent Claims (29, 30)
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Specification