ASIC ELEMENT INCLUDING A VIA

• US 20140374918A1
• Filed: 06/17/2014
• Published: 12/25/2014
• Est. Priority Date: 06/20/2013
• Status: Active Grant

• Current Assignee: Robert Bosch GmbH
• Original Assignee: Robert Bosch GmbH
• Inventors: WEBER, Heribert, KUEPPERS, Hartmut, Reutlingen, Jens, DAVIES, Neil
• Granted Patent: US 9,153,523 B2
• Time in Patent Office: Days
• US Class Current: 257/774
• CPC Class Codes: B81C 1/00238 Joining a substrate with an electronic processing unit and a substrate with a micromechanical structure
• CPC Class Codes: B81C 2203/0109 Bonding an individual cap on the substrate
• CPC Class Codes: B81C 2203/0792 Forming interconnections between the electronic processing unit and the micromechanical structure
• CPC Class Codes: B81C 3/001 Bonding of two components
• CPC Class Codes: G01C 19/5783 Mountings or housings not specific to any of the devices covered by groups G01C19/5607 - G01C19/5719
• CPC Class Codes: H01L 23/481 Internal lead connections, e.g. via connections, feedthrough structures
• CPC Class Codes: H01L 2924/00 Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
• CPC Class Codes: H01L 2924/0002 Not covered by any one of groups H01L24/00, H01L24/00 and H01L2224/00

Abstract

In an ASIC element, vias are integrated into the CMOS processing of an ASIC substrate. The ASIC element includes an active front side in which the circuit functions are implemented. The at least one via is intended to establish an electrical connection between the active front side and the rear side of the element. The front side of the via is defined by at least one front-side trench which is completely filled, and the rear side is defined by at least one rear-side trench which is not completely filled. The rear-side trench opens into the filled front-side trench.

Claims

1. An ASIC element, comprising:

an active front side in which circuit functions are implemented; and

at least one via which establishes an electrical connection between the active front side and a rear side of the ASIC element;

wherein the front side of the via is defined by at least one front-side trench which is completely filled, and wherein the rear side of the via is defined by at least one rear-side trench which is not completely filled, the rear-side trench opening into the filled front-side trench.

2. The ASIC element as recited in claim 1, wherein the front-side trench and the rear-side trench are implemented as annular isolation trenches which electrically isolate a selected substrate area extending across the complete thickness of the ASIC substrate, the selected substrate area functioning as the at least one via.

3. The ASIC element as recited in claim 1, wherein:

the front-side trench is electrically isolated from the adjacent semiconductor material by at least one dielectric layer;

the front-side trench is filled with an electrically conductive material;

the rear-side trench is electrically isolated from the adjacent semiconductor material by at least one dielectric layer; and

at least one printed conductor track is routed from a wiring level on the rear side of the ASIC element on the wall of the rear-side trench to the electrically conductive material filling the front-side trench.

4. The ASIC element as recited in claim 3, wherein the front-side trench is filled with polysilicon.

5. The ASIC element as recited in claim 3, wherein the front-side trench is filled with a metal, and at least one metallic printed conductor track is routed from a wiring level on the rear side of the element on the wall of the rear-side trench to the metal filling the front-side trench.

6. The ASIC element as recited in claim 5, wherein the front-side trench extends into the depth of a bottom-trench isolation of the circuit functions in the active front side.

7. A vertically integrated hybrid component, comprising:

at least one ASIC element including;

an active front side in which circuit functions are implemented; and

at least one via which establishes an electrical connection between the active front side and a rear side of the ASIC element;

wherein the front side of the via is defined by at least one front-side trench which is completely filled, and wherein the rear side of the via is defined by at least one rear-side trench which is not completely filled, the rear-side trench opening into the filled front-side trench; and

at least one additional element, wherein the rear side of the ASIC element is installed on the additional element such that the rear-side trench of the at least one via is sealed and a conductive connection exists between the at least one via and the at least one additional element.