FILM FORMING DEVICE AND MANUFACTURING METHOD FOR GLASS WITH FILM

• US 20140377461A1
• Filed: 12/05/2012
• Published: 12/25/2014
• Est. Priority Date: 12/16/2011
• Status: Active Application

• Current Assignee: Nippon Electric Glass Company Limited
• Original Assignee: Nippon Electric Glass Company Limited
• Inventors: Saitoh, Takayoshi
• Granted Patent: US 9,463,998 B2
• Time in Patent Office: Days
• US Class Current: 427/255.26
• CPC Class Codes: C03C 17/002 for flat glass, e.g. float glass
• CPC Class Codes: C03C 17/09 by deposition from the vapour phase
• CPC Class Codes: C03C 17/245 by deposition from the vapour phase
• CPC Class Codes: C03C 2217/21 Oxides
• CPC Class Codes: C03C 2217/25 Metals
• CPC Class Codes: C03C 2217/948 Layers comprising indium tin oxide [ITO]
• CPC Class Codes: C03C 2218/152 by cvd
• CPC Class Codes: C03C 2218/154 by sputtering
• CPC Class Codes: C23C 14/0036 Reactive sputtering
• CPC Class Codes: C23C 14/541 Heating or cooling of the substrates
• CPC Class Codes: C23C 14/562 for coating elongated substrates
• CPC Class Codes: C23C 16/46 characterised by the method used for heating the substrate C23C16/48, C23C16/50 take precedence
• CPC Class Codes: C23C 16/545 for coating elongated substrates

Abstract

Provided is a device capable of suitably forming a film on a glass film. A film forming device (1) includes a heating roll (20) and a film forming unit (30). The heating roll (20) has a surface onto which a glass film (10) is to be fed. The heating roll (20) is configured to heat the glass film (10). The film forming unit (30) is configured to form a film on the glass film (10). The heating roll (20) includes a cylindrical body (21) and a heater (22). The cylindrical body (21) is made of glass or ceramic. The cylindrical body (21) is rotatably provided. The heater (22) is disposed in an interior of the cylindrical body (21). The heater (22) is configured to heat the cylindrical body (21).

Claims

1. :

A film forming device comprising;

a heating roll having a surface onto which a glass film is to be fed, the heating roll being configured to heat the glass film; and

a film forming unit configured to form a film on the glass film,

wherein the heating roll comprises;

a cylindrical body made of glass or ceramic and provided rotatably; and

a heater disposed in an interior of the cylindrical body and configured to heat the cylindrical body.

2. :

The film forming device according to claim 1, wherein the cylindrical body is made of at least one selected from the group consisting of quartz glass, crystallized glass, alumina, silica, silicon nitride, and silicon carbide.

3. :

The film forming device according to claim 1, further comprising a feed unit located between the cylindrical body and the glass film and configured to feed a sheet whose surface layer next to the glass film has a lower hardness than the glass film.

4. :

The film forming device according to claim 3, wherein the sheet is made of metal.

5. :

The film forming device according to claim 1, wherein the sheet has one to ten times the coefficient of thermal expansion of the glass film.

6. :

The film forming device according to claim 1, wherein the heater is configured to heat a portion of the cylindrical body coming into contact with the glass film.

7. :

The film forming device according to claim 1, wherein the heater is configured to emit heat rays toward the cylindrical body.

8. :

The film forming device according to claim 7, further comprising an absorbing layer disposed on an inner peripheral surface of the cylindrical body and capable of absorbing heat rays emitted from the heater.

9. :

The film forming device according to claim 1, wherein the film forming unit is constituted by a reactive gas supply unit configured to supply a reactive gas capable of thermally reacting on the glass film to form a film thereon or a sputtering unit configured to deposit sputtered particles on the glass film.

10. :

A method for manufacturing a film-coated glass film, the method comprising forming a film on a glass film using the film forming device according to claim 1.

11. :

The method for manufacturing a film-coated glass film according to claim 10, wherein the film is formed by thermal CVD or sputtering.