INTEGRATED GAS SENSOR DEVICE, IN PARTICULAR FOR DETECTING CARBON MONOXIDE (CO)
First Claim
1. An integrated gas sensor device comprising:
- a substrate having a first surface and a second surface and having one or more first through holes that extend between the first and second surfaces;
an insulating layer on said first surface of said substrate, the insulating layer including a plurality of second through holes and a plurality of third through holes;
a working electrode, a counter electrode and a reference electrode on said insulating layer, said working electrode and said counter electrode having active areas, respectively, that are exposed to an environment external to the device by the plurality of second through holes and the plurality of third through holes, respectively, and the one or more first through holes in the substrate;
an electrolyte layer on the working electrode, the counter electrode and the reference electrode; and
a hydrogel layer on said electrolyte layer, said electrolyte and hydrogel layers having a substantially same perimeter and covering at least said working, counter and reference electrodes, said hydrogel layer configured act as a “
quasi solid state”
water reservoir.
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Accused Products
Abstract
It is described an integrated gas sensor device comprising a silicon substrate and an oxide layer on the silicon substrate, as well as a working electrode, a counter electrode and a reference electrode, on the oxide layer, the working electrode and the counter electrode having respective active area exposed to an environmental air through at least a plurality of first openings and a plurality of second openings in the oxide layer in correspondence of the working electrode and of the counter electrode, further comprising an electrolyte layer portion and a hydrogel layer portion on the electrolyte layer portion, the electrolyte and hydrogel layer portions having a same size, suitable to cover at least the working, counter and reference electrodes, the hydrogel layer portion acting as a “quasi solid state” water reservoir.
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Citations
27 Claims
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1. An integrated gas sensor device comprising:
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a substrate having a first surface and a second surface and having one or more first through holes that extend between the first and second surfaces; an insulating layer on said first surface of said substrate, the insulating layer including a plurality of second through holes and a plurality of third through holes; a working electrode, a counter electrode and a reference electrode on said insulating layer, said working electrode and said counter electrode having active areas, respectively, that are exposed to an environment external to the device by the plurality of second through holes and the plurality of third through holes, respectively, and the one or more first through holes in the substrate; an electrolyte layer on the working electrode, the counter electrode and the reference electrode; and a hydrogel layer on said electrolyte layer, said electrolyte and hydrogel layers having a substantially same perimeter and covering at least said working, counter and reference electrodes, said hydrogel layer configured act as a “
quasi solid state”
water reservoir. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16, 17, 18, 19, 20, 21)
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22. A manufacturing process of forming an integrated gas sensor device, the process comprising:
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forming an insulating layer on a first surface of a silicon substrate; forming a patterned layer over the insulating that includes a first metal layer and a second metal layer to define a reference electrode, a working electrode and a counter electrode of said integrated gas sensor device, said forming defining respective first through holes in said first metal layer and said second metal layer of said working and counter electrodes; etching said insulating layer and defining second through holes in said insulating layer that are in correspondence with said first through holes of said working and counter electrodes; forming an electrolyte layer on said insulating layer; forming a hydrogel layer on said electrolyte layer; and exposing active areas of said working and counter electrodes to an external environment. - View Dependent Claims (23, 24, 25, 26, 27)
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Specification