INFRARED CAMERA SENSOR
First Claim
1. A device, comprising:
- a substrate;
a membrane above the substrate;
a single chamber having a plurality of integrated cavities;
a plurality of support structures between the membrane and the substrate, the support structures positioned between adjacent cavities;
an array of infrared sensor cells on the substrate, each cell positioned at a boundaries between adjacent cavities, each cell including;
a first infrared reflector layer on the substrate between two of the support structures;
a thermally conductive resistive layer on the membrane and positioned above the first infrared reflector layer;
a second infrared reflector layer on the resistive layer; and
an infrared absorption layer on the resistive layer.
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Accused Products
Abstract
The present disclosure is directed to an infrared sensor that includes a plurality of pairs of support structures positioned on the substrate, each pair including a first support structure adjacent to a second support structure. The sensor includes plurality of pixels, where each pixel is associated with one of the pairs of support structures. Each pixel includes a first infrared reflector layer on the substrate between the first and the second support structures, a membrane formed on the first and second support structures, a thermally conductive resistive layer on the membrane and positioned above the first infrared reflector layer, a second infrared reflector layer on the resistive layer, and an infrared absorption layer on the second infrared reflector layer.
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Citations
14 Claims
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1. A device, comprising:
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a substrate; a membrane above the substrate; a single chamber having a plurality of integrated cavities; a plurality of support structures between the membrane and the substrate, the support structures positioned between adjacent cavities; an array of infrared sensor cells on the substrate, each cell positioned at a boundaries between adjacent cavities, each cell including; a first infrared reflector layer on the substrate between two of the support structures; a thermally conductive resistive layer on the membrane and positioned above the first infrared reflector layer; a second infrared reflector layer on the resistive layer; and an infrared absorption layer on the resistive layer. - View Dependent Claims (2, 3, 4, 5)
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6. An infrared sensor, comprising:
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a substrate; a plurality of pairs of support structures positioned on the substrate, each pair including a first support structure adjacent to a second support structure; a plurality of pixels, each pixel associated with one of the pairs of support structures, each pixel including; a first infrared reflector layer on the substrate between the first and the second support structures; a membrane formed on the first and second support structures; a thermally conductive resistive layer on the membrane and positioned above the first infrared reflector layer; a second infrared reflector layer on the resistive layer; and an infrared absorption layer on the second infrared reflector layer. - View Dependent Claims (7, 8, 9, 10)
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11. A method, comprising:
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forming a membrane above a substrate; forming a single chamber having a plurality of integrated cavities; forming a plurality of support structures between the membrane and the substrate, the support structures positioned between adjacent cavities; forming an array of infrared sensor cells on the substrate, each cell positioned at boundaries between adjacent cavities, the forming of the array including; forming a first infrared reflector layer on the substrate between two of the support structures; forming a thermally conductive resistive layer on the membrane and positioned above the first infrared reflector layer; forming a second infrared reflector layer on the resistive layer; and forming an infrared absorption layer on the resistive layer. - View Dependent Claims (12, 13, 14)
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Specification