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METHOD OF FORMING A MAGNETIC MEMS TUNABLE CAPACITOR

  • US 20150002984A1
  • Filed: 06/28/2013
  • Published: 01/01/2015
  • Est. Priority Date: 06/28/2013
  • Status: Abandoned Application
First Claim
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1. An apparatus comprising:

  • a die;

    a carrier coupled to the die, the carrier comprising contact points for connection to another device or assembly; and

    at least one capacitor positioned in or on the carrier, the at least one capacitor comprising a first electrode, a second electrode comprising an electrode surface suspended over an electrode surface of the first electrode and a dielectric material disposed between the first electrode and the second electrode; and

    a magnet positioned in or on the carrier such that a magnetic field produced by the magnet at least partially actuates the second electrode toward the first electrode.

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