METHOD OF FORMING A MAGNETIC MEMS TUNABLE CAPACITOR
First Claim
1. An apparatus comprising:
- a die;
a carrier coupled to the die, the carrier comprising contact points for connection to another device or assembly; and
at least one capacitor positioned in or on the carrier, the at least one capacitor comprising a first electrode, a second electrode comprising an electrode surface suspended over an electrode surface of the first electrode and a dielectric material disposed between the first electrode and the second electrode; and
a magnet positioned in or on the carrier such that a magnetic field produced by the magnet at least partially actuates the second electrode toward the first electrode.
1 Assignment
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Accused Products
Abstract
An apparatus including a die; a carrier coupled to the die; and at least one capacitor positioned in or on the carrier, the at least one capacitor including a first electrode, a second electrode and a dielectric material; and a magnet positioned such that a magnetic field at least partially actuates the second electrode toward the first electrode. A method including disposing a die, a first electrode of a capacitor and a magnet on a sacrificial substrate; forming a dielectric layer on the first electrode; patterning a conductive material coupled to the first electrode; patterning a second electrode on the dielectric layer; and removing the sacrificial substrate. A method including exposing a suspended first electrode of a capacitor in a package to a magnetic field; driving a current in a first direction through the first electrode; and establishing a voltage difference between the first electrode and a second electrode.
11 Citations
20 Claims
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1. An apparatus comprising:
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a die; a carrier coupled to the die, the carrier comprising contact points for connection to another device or assembly; and at least one capacitor positioned in or on the carrier, the at least one capacitor comprising a first electrode, a second electrode comprising an electrode surface suspended over an electrode surface of the first electrode and a dielectric material disposed between the first electrode and the second electrode; and a magnet positioned in or on the carrier such that a magnetic field produced by the magnet at least partially actuates the second electrode toward the first electrode. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8)
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9. A method comprising:
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disposing a die, a first electrode of a capacitor and a magnet on a sacrificial substrate; forming a dielectric layer on a surface of the first electrode; patterning a conductive material coupled to a contact point of the die and coupled to the first electrode; patterning a second electrode on the dielectric layer; and removing the sacrificial substrate. - View Dependent Claims (10, 11, 12, 13, 14, 15, 16, 17)
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18. A method comprising:
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exposing a suspended first electrode of a capacitor in a package to a magnetic field; driving a current in a first direction through the first electrode; and establishing a voltage difference between the first electrode and a second electrode. - View Dependent Claims (19, 20)
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Specification