METHOD AND SYSTEM FOR CONTROLLING A FLOW RATIO CONTROLLER USING FEED-FORWARD ADJUSTMENT

• US 20150005956A1
• Filed: 08/20/2013
• Published: 01/01/2015
• Est. Priority Date: 06/28/2013
• Status: Active Grant

• Current Assignee: Applied Materials Incorporated
• Original Assignee: Applied Materials Incorporated
• Inventors: Gregor, Mariusch
• Granted Patent: US 10,108,205 B2
• Time in Patent Office: Days
• US Class Current: 700/282
• CPC Class Codes: G05D 7/0664 the plurality of throttling means being arranged for the control of a plurality of diverging flows from a single flow G05D7/0652 takes precedence; ratio control G05D11/13

Abstract

A processing device determines a plurality of initial flow setpoint commands, each of the plurality of setpoint commands corresponding to one of a plurality of valves, and sends each of the plurality of initial setpoint commands to a corresponding one of the plurality of valves. The processing device monitors the plurality of valves for a flow condition requiring and adjustment. Upon detecting the flow condition, the processing device predicts the adjustment based on previous setpoints, and determines a plurality of updated flow setpoint commands, each of which corresponds to one of the plurality of valves based on the the predicted adjustment. The processing device then sends each of the plurality of updated setpoint commands to the corresponding one of the plurality of valves.

Claims

1. A method comprising:

determining a plurality of initial setpoint commands, each of the plurality of initial setpoint commands corresponding to one of a plurality of valves;

sending each of the plurality of initial setpoint commands to a corresponding one of the plurality of valves;

monitoring the plurality of valves for a flow condition requiring an adjustment;

upon detecting the flow condition, predicting the adjustment based on previous setpoints;

determining, by a processing device, a plurality of updated setpoint commands, each of the plurality of updated setpoint commands corresponding to one of the plurality of valves, based on the predicted adjustment; and

sending each of the plurality of updated setpoint commands to the corresponding one of the plurality of valves.

2. The method of claim 1, wherein the initial setpoint command comprises at least one of a flow setpoint or a valve position setpoint.

3. The method of claim 1, wherein the adjustment comprises at least one of a flow setpoint or a valve position setpoint.

4. The method of claim 1, wherein each of the plurality of initial setpoint commands is based on a corresponding flow percentage, an initial total flow and a corresponding initial valve voltage.

5. The method of claim 1, wherein the valve comprises a mass flow controller.

6. The method of claim 1, wherein the flow condition requiring the adjustment comprises a non-symmetrical change in flow across the plurality of valves.

7. The method of claim 1, wherein the previous setpoints comprise a plurality of stored setpoints recorded during prior stable flow conditions.

8. A system comprising a controller programmed to execute instructions comprising:

determining a plurality of initial setpoint commands, each of the plurality of initial setpoint commands corresponding to one of a plurality of valves;

sending each of the plurality of initial setpoint commands to a corresponding one of the plurality of valves;

monitoring the plurality of valves for a flow condition requiring an adjustment;

upon detecting the flow condition, predicting the adjustment based on previous setpoints;

determining, by a processing device, a plurality of updated setpoint commands, each of the plurality of updated setpoint commands corresponding to one of the plurality of valves, based on the predicted adjustment; and

sending each of the plurality of updated setpoint commands to the corresponding valve.

9. The system of claim 8, wherein the initial setpoint command comprises at least one of a flow setpoint or a valve position setpoint.

10. The system of claim 8, wherein the adjustment comprises at least one of a flow setpoint or a valve position setpoint.

11. The system of claim 8, wherein each of the plurality of initial setpoint commands is based on a corresponding flow percentage, an initial total flow and a corresponding initial valve voltage.

12. The system of claim 8, wherein the valve comprises a mass flow controller.

13. The system of claim 8, wherein the flow condition requiring the adjustment comprises a non-symmetrical change in flow across the plurality of valves.

14. The system of claim 8, wherein the previous setpoints comprise a plurality of stored setpoints recorded during prior stable flow conditions.

15. A computer readable medium having instructions that, when executed by a processing device, cause the processing device to perform a method comprising:

determining a plurality of initial setpoint commands, each of the plurality of initial setpoint commands corresponding to one of a plurality of valves;

sending each of the plurality of initial setpoint commands to a corresponding one of the plurality of valves;

monitoring the plurality of valves for a flow condition requiring an adjustment;

upon detecting the flow condition, predicting the adjustment based on previous setpoints;

determining, by a processing device, a plurality of updated setpoint commands, each of the plurality of updated setpoint commands corresponding to one of the plurality of valves, based on the predicted adjustment; and

sending each of the plurality of updated setpoint commands to the corresponding valve.

16. The computer readable medium of claim 15, wherein the initial setpoint command comprises at least one of a flow setpoint or a valve position setpoint.

17. The computer readable medium of claim 15, wherein the adjustment comprises at least one of a flow setpoint or a valve position setpoint.

18. The computer readable medium of claim 15, wherein each of the plurality of initial setpoint commands is based on a corresponding flow percentage, an initial total flow and a corresponding initial valve voltage.

19. The computer readable medium of claim 15, wherein the flow condition requiring the adjustment comprises a non-symmetrical change in flow across the plurality of valves.

20. The computer readable medium of claim 15, wherein the previous setpoints comprise a plurality of stored setpoints recorded during prior stable flow conditions.