SYSTEM AND METHOD FOR PROVIDING A SELF VALIDATING MASS FLOW CONTROLLER AND MASS FLOW METER

• US 20150007897A1
• Filed: 03/04/2013
• Published: 01/08/2015
• Est. Priority Date: 03/07/2012
• Status: Active Grant

• Current Assignee: Illinois Tool Works Inc.
• Original Assignee: Illinois Tool Works Inc.
• Inventors: Valentine, Bill, Ellec, Chris, Banares, Berwin, Lull, John, Kehoe, Anthony
• Granted Patent: US 10,048,105 B2
• Time in Patent Office: Days
• US Class Current: 137/487.5
• CPC Class Codes: G01F 1/68 by using thermal effects
• CPC Class Codes: G01F 1/88 with differential-pressure measurement to determine the volume flow
• CPC Class Codes: G01F 25/10 of flowmeters
• CPC Class Codes: G01F 25/15 specially adapted for gas meters G01F25/11 - G01F25/14, G01F25/17 take precedence
• CPC Class Codes: G01F 5/00 Measuring a proportion of the volume flow
• CPC Class Codes: G05D 7/0635 by action on throttling means G05D7/0688, G05D7/0694 take precedence
• CPC Class Codes: Y10T 137/7761 Electrically actuated valve
• CPC Class Codes: Y10T 137/87684 Valve in each inlet

Abstract

The disclosed embodiments include a method, apparatus, and computer program product for providing a self-validating mass flow controller or mass flow meter without requiring any software modification to a tool/tool controller in which the mass flow controller is being utilized. For example, the disclosed embodiments include a mass flow controller comprising an internal valve configured to receive a first pneumatic line coupled to a tool pilot valve and couple a second pneumatic line from the internal valve to an external isolation valve upstream of the inlet. The mass flow controller also includes at least one processing component configured to execute instructions to perform an in-situ rate of decay measurement after executing instructions to close the external isolation valve by using the internal valve to block airflow being received through the first pneumatic line.

Claims

1. An apparatus comprising:

an inlet for receiving the fluid from a gas delivery line having an external isolation valve upstream of the inlet;

a flow path in which the fluid passes through the apparatus;

a mass flow sensor for providing a signal corresponding to mass flow of the fluid through the flow path;

a pressure transducer coupled to the flow path configured to measure pressure at a point in the flow path; and

an internal valve configured to receive a first pneumatic line coupled to a tool pilot valve and couple a second pneumatic line from the internal valve to an external isolation valve upstream of the inlet.

2. The apparatus of claim 1, further comprising at least one processing component configured to execute instructions to perform an in-situ rate of decay measurement after executing instructions to close the external isolation valve by using the internal valve to block airflow being received through the first pneumatic line.

3. The apparatus of claim 2, wherein the first pneumatic line and the second pneumatic line are routed through an opening on a top surface of the apparatus.

4. The apparatus of claim 2, wherein the first pneumatic line and the second pneumatic line are routed through an opening on a side surface of the apparatus.

5. The apparatus of claim 3, wherein the at least one processing component is further configured to execute instructions to identify a length of time for completing a rate of decay measurement, analyze patterns in processing time of a tool that is utilizing the apparatus to identify processing time segments that would allow the apparatus to complete the rate of decay measurement without interfering with a process of the tool, and perform the in-situ rate of decay measurement during an identified processing time segment.

6. The apparatus of claim 3, wherein the at least one processing component is further configured to execute instructions to raise an alarm if the in-situ rate of decay measurement indicates that a characteristic of the apparatus has changed by a certain amount in a given period of time.

7. The apparatus of claim 3, wherein the at least one processing component is further configured to execute instructions to perform the in-situ rate of decay measurement in one of two different measurement modes.

8. The apparatus of claim 3, further comprising memory for internally logging and trending of various measurements performed inside the apparatus.

9. The apparatus of claim 3, wherein the at least one processing component is further configured to execute instructions to self-correct its calibration and offset based on results of the in-situ rate of decay measurement.

10. An apparatus comprising:

an inlet for receiving the fluid from a gas delivery line having an external isolation valve upstream of the inlet;

a flow path in which the fluid passes through the apparatus;

a mass flow sensor for providing a signal corresponding to mass flow of the fluid through the flow path;

a pressure transducer coupled to the flow path configured to measure pressure at a point in the flow path; and

an electrical relay configured to be coupled between a first electrical line from a tool controller and a second electrical line to a tool pilot valve.

11. The apparatus of claim 10, further comprising at least one processing component configured to execute instructions to perform an in-situ rate of decay measurement after executing instructions to close the external isolation valve by sending a close valve signal to the tool pilot valve via the second electrical line.

12. The apparatus of claim 11, wherein the at least one processing component is further configured to execute instructions to identify a length of time for completing a rate of decay measurement, analyze patterns in processing time of a tool that is utilizing the apparatus to identify processing time segments that would allow the apparatus to complete the rate of decay measurement without interfering with a process of the tool, and perform the in-situ rate of decay measurement during an identified processing time segment.

13. The apparatus of claim 11, wherein the at least one processing component is further configured to execute instructions to perform the in-situ rate of decay measurement in one of two different measurement modes.

14. The apparatus of claim 11, wherein the at least one processing component is further configured to execute instructions to self-correct its calibration and offset based on results of the in-situ rate of decay measurement.

15. An apparatus comprising:

an inlet for receiving the fluid from a gas delivery line having an external isolation valve upstream of the inlet;

a flow path in which the fluid passes through the apparatus;

a mass flow sensor for providing a signal corresponding to mass flow of the fluid through the flow path;

a pressure transducer coupled to the flow path configured to measure pressure at a point in the flow path; and

an electrical relay configured to be couple the external isolation valve.

16. The apparatus of claim 15, further comprising at least one processing component configured to execute instructions to perform an in-situ rate of decay measurement after executing instructions to close the external isolation valve by sending a close valve signal to the external isolation valve.

17. The apparatus of claim 16, wherein the at least one processing component is further configured to execute instructions to identify a length of time for completing a rate of decay measurement, analyze patterns in processing time of a tool that is utilizing the apparatus to identify processing time segments that would allow the apparatus to complete the rate of decay measurement without interfering with a process of the tool, perform the in-situ rate of decay measurement during an identified processing time segment, and raise an alarm if the in-situ rate of decay measurement indicates that a characteristic of the apparatus has changed by a certain amount in a given period of time.

18. The apparatus of claim 16, wherein the at least one processing component is further configured to execute instructions to perform the in-situ rate of decay measurement in one of two different measurement modes.

19. The apparatus of claim 16, wherein the at least one processing component is further configured to execute instructions to self-correct its calibration and offset based on results of the in-situ rate of decay measurement.

20. An isolation valve comprising:

a first valve configured to be couple to a pneumatic line, the first valve configured to open in response to receiving air flow from the pneumatic line; and

a second valve configured to receive an electrical signal, the second valve operable to block the air flow from the pneumatic line to cause the first valve to close.