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TECHNIQUE FOR FORMING A MEMS DEVICE

  • US 20150008545A1
  • Filed: 09/24/2014
  • Published: 01/08/2015
  • Est. Priority Date: 03/30/2011
  • Status: Active Grant
First Claim
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1. An apparatus formed on a substrate including at least one semiconductor device, the apparatus comprising:

  • a microelectromechanical system (MEMS) device comprising at least one of a portion of a first structural layer and a portion of a second structural layer formed above the first structural layer, the second structural layer having a thickness substantially greater than a thickness of the first structural layer.

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