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SELF-POWERED PIEZOELECTRIC ENERGY HARVESTING MICROSYSTEM

  • US 20150008792A1
  • Filed: 07/07/2014
  • Published: 01/08/2015
  • Est. Priority Date: 07/05/2013
  • Status: Active Grant
First Claim
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1. A method of forming a self-powered piezoelectric energy harvesting microsystem, comprising:

  • forming integrated circuit elements including transistor gate structures and source/drain regions using CMOS processing steps at a proof mass first portion of a die region of a semiconductor wafer substrate;

    depositing and patterning dielectric layers and metal layers at the first portion of the die region to form contacts and interconnections for the integrated circuit elements;

    depositing and patterning first electrode, piezoelectric material and second electrode layers at a beam second portion of the die region to form piezoelectric energy harvesting unit components connected to the integrated circuit elements;

    etching fully through the substrate to form a support frame third portion of the die region separated by a gap from a majority of the first portion and joining by the second portion to a minority of the first portion;

    etching partially through the substrate to thin the second portion; and

    providing a battery connected to the integrated circuit elements at the first portion of the die region.

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