ACTIVE SPECIES RADIATION DEVICE AND ACTIVE SPECIES RADIATION METHOD
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Accused Products
Abstract
An active species radiation device is for efficiently radiating active species (active oxygen or nitrogen) by using a plasma source not in contact with an irradiated object. An active species radiation device (100) includes: a chamber (110) in which flows of plasma generation gas and active species generation gas enter and which has an active species radiation port (110c) through which active species are radiated; an upstream electrode (120) positioned in a part of the chamber (110) corresponding to an upstream portion of the flow of the plasma generation gas; and a downstream electrode (130) positioned in a part of the chamber (110) corresponding to a more downstream portion of the flow of the plasma generation gas than the upstream electrode (120). The chamber (110) is configured so that the active species generation gas flows into a position between the upstream electrode (120) and the active species radiation port (110c).
12 Citations
30 Claims
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1-15. -15. (canceled)
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16. An active species radiation device comprising:
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a chamber in which flows of plasma generation gas and active species generation gas enter and which has an active species radiation port through which active species are radiated; an upstream electrode that is positioned in a part of the chamber corresponding to an upstream portion of the flow of the plasma generation gas; and a downstream electrode that is positioned in a part of the chamber corresponding to a more downstream portion of the flow of the plasma generation gas than where the upstream electrode is positioned, the downstream electrode being configured to cause plasma to be generated from the plasma generation gas in a position between the upstream electrode and the downstream electrode, wherein the chamber includes; a first pipe part in which the upstream electrode is positioned and having an inflow port for the plasma generation gas; a second pipe part having an inflow port for the active species generation gas; and a third pipe part in which the downstream electrode is positioned and having the active species radiation port, and the first pipe part, the second pipe part, and the third pipe part are joined together in one location so as to form a non-coaxial multi-way tube. - View Dependent Claims (17, 18, 19, 20, 21, 22, 23, 24, 25)
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26. An active species radiation method for radiating active species by employing an active species radiation device that includes:
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a chamber in which flows of plasma generation gas and active species generation gas enter and which has an active species radiation port through which active species are radiated; an upstream electrode that is positioned in a part of the chamber corresponding to an upstream portion of the flow of the plasma generation gas; and a downstream electrode that is positioned in a part of the chamber corresponding to a more downstream portion of the flow of the plasma generation gas than where the upstream electrode is positioned, the downstream electrode being configured to cause plasma to be generated from the plasma generation gas in a position between the upstream electrode and the downstream electrode, the chamber including; a first pipe part in which the upstream electrode is positioned and having an inflow port for the plasma generation gas; a second pipe part having an inflow port for the active species generation gas; and a third pipe part in which the downstream electrode is positioned and having the active species radiation port, the first pipe part, the second pipe part, and the third pipe part being joined together in one location so as to form a non-coaxial multi-way tube, the active species radiation method comprising; generating plasma by causing the flow of the plasma generation gas to enter; generating the active species by causing the active species generation gas to flow into the plasma generation gas from which the plasma is being generated; and radiating the active species through the active species radiation port. - View Dependent Claims (27, 28, 29, 30)
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Specification