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MICROWAVE PLASMA PROCESSING APPARATUS, SLOT ANTENNA, AND SEMICONDUCTOR DEVICE

  • US 20150013907A1
  • Filed: 07/09/2014
  • Published: 01/15/2015
  • Est. Priority Date: 07/10/2013
  • Status: Abandoned Application
First Claim
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1. A microwave plasma processing apparatus comprising:

  • a cooling plate;

    an intermediate metal body installed on a processing container side of the cooling plate to be spaced apart from the cooling plate so that a spacing between the intermediate metal body and the cooling plate forms a waveguide of microwaves, wherein the intermediate metal body is in contact with the cooling plate at one or plural convex portions arranged to block a portion of the waveguide;

    a coaxial waveguide configured to supply microwaves to the waveguide;

    a slot antenna plate configured to radiate microwaves via the waveguide;

    a dielectric window installed on the processing container side of the slot antenna plate; and

    a processing container installed to be sealed by the dielectric window.

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