MICROWAVE PLASMA PROCESSING APPARATUS, SLOT ANTENNA, AND SEMICONDUCTOR DEVICE

• US 20150013907A1
• Filed: 07/09/2014
• Published: 01/15/2015
• Est. Priority Date: 07/10/2013
• Status: Abandoned Application

• Current Assignee: Tokyo Electron Limited
• Original Assignee: Tokyo Electron Limited
• Inventors: FUJII, Toru, IWAO, Toshihiko, SENDA, Takahiro
• Application Number:
  US14/326,656
• Publication Number:
  US 20150013907A1
• Time in Patent Office: Days
• US Class Current: 156/345.27
• CPC Class Codes: H01J 37/32192 Microwave generated discharge H01J37/32357, H01J37/32366, H01J37/32394, H01J37/32403 take precedence
• CPC Class Codes: H01J 37/3222 Antennas
• CPC Class Codes: H01J 37/32229 Waveguides
• CPC Class Codes: H01J 37/32266 Means for controlling power transmitted to the plasma
• CPC Class Codes: H01J 37/32522 Temperature

Abstract

Disclosed is a microwave plasma processing apparatus. The microwave plasma processing apparatus includes a cooling plate. In addition, the microwave plasma processing apparatus includes an intermediate metal body installed on a processing container side of the cooling plate to be spaced apart from the cooling plate so that a spacing between the intermediate metal body and the cooling plate forms a waveguide of microwaves. The intermediate metal body is in contact with the cooling plate at one or plural convex portions arranged to block a portion of the waveguide. Further, the microwave plasma processing apparatus includes a coaxial waveguide configured to supply microwaves to the waveguide, a slot antenna plate configured to radiate microwaves via the waveguide, a dielectric window installed on the processing container side of the slot antenna plate, and a processing container installed to be sealed by the dielectric window.

Claims

1. A microwave plasma processing apparatus comprising:

a cooling plate;

an intermediate metal body installed on a processing container side of the cooling plate to be spaced apart from the cooling plate so that a spacing between the intermediate metal body and the cooling plate forms a waveguide of microwaves, wherein the intermediate metal body is in contact with the cooling plate at one or plural convex portions arranged to block a portion of the waveguide;

a coaxial waveguide configured to supply microwaves to the waveguide;

a slot antenna plate configured to radiate microwaves via the waveguide;

a dielectric window installed on the processing container side of the slot antenna plate; and

a processing container installed to be sealed by the dielectric window.

2. The microwave plasma processing apparatus of claim 1, wherein the intermediate metal body is in contact with the cooling plate at one or plural convex portions, and includes a donut-concave portion that separate the processing container side surface of the intermediate metal body into a center side portion and an outer periphery side portion,

the slot antenna plate is installed to be in contact with the convex portion to the processing container side of the intermediate metal body, wherein on the processing container side surface, the slot antenna plate includes, as slots for radiating microwaves, a first slot formed in a more center side portion than a portion which is in contact with the convex portion, and a second slot formed in a more outer periphery side than the portion which is in contact with the convex portion,

the coaxial waveguide is installed in a through hole which is formed in the center side portion in the intermediate metal body to continuously extend through the cooling plate and the intermediate metal body, and includes an inner conductor, an intermediate conductor, and an outer conductor, and the microwaves are transmitted by each of a space between the inner conductor installed in a hollow portion of the intermediate conductor and the intermediate conductor, and a space between the intermediate conductor installed in a hollow portion of the outer conductor and the outer conductor,

the inner waveguide transmits the microwaves to the first slot by transmitting the microwaves in a center side space, which is positioned at a more center side than the convex portion in a space between the slot antenna plate and the intermediate metal body, through the space between the inner conductor and the intermediate conductor, and

the outer waveguide transmits the microwaves to the second slot by transmitting the microwaves in an outer periphery side space, which is positioned at a more outer periphery side than the convex portion in the space between the space between the slot antenna plate and the intermediate metal body, sequentially through the space between the intermediate conductor and the outer conductor and the space between the intermediate metal body and the cooling plate, the one or plural convex portions being formed in the outer waveguide.

3. The microwave plasma processing apparatus of claim 1, wherein a slow-wave plate is installed within a waveguide on a slot.

4. The microwave plasma processing apparatus of claim 3, wherein the one or plural convex portions where the cooling plate and the intermediate metal body are in contact with each other are provided in a portion where the outer slow-wave plate is not installed.

5. The microwave plasma processing apparatus of claim 1, wherein the cooling plate includes a flow hole configured to circulate a coolant, and the intermediate metal body includes a flow hole connected with the flow hole of the cooling plate through the one or plural convex portions 208g where the cooling plate and the intermediate metal body are in contact with each other.

6. The microwave plasma processing apparatus of claim 1, wherein the intermediate metal body includes a uniform-heating unit.

7. The microwave plasma processing apparatus of claim 1, further comprising:

a temperature measurement unit configured to measure a temperature of the intermediate metal body through the one or plural convex portions within the intermediate metal body.

8. The microwave plasma processing apparatus of claim 1, further comprising:

a heating unit configured to heat the intermediate metal body through the one or plural convex portions within the intermediate metal body.

9. A slot antenna comprising:

a cooling plate;

an intermediate metal body installed on a processing container side of the cooling plate to be spaced apart from the cooling plate so that a spacing between the intermediate metal body and the cooling plate forms a waveguide of microwaves, wherein the intermediate metal body is in contact with the cooling plate at one or plural convex portions arranged to block a portion of the waveguide;

a coaxial waveguide configured to supply microwaves to the waveguide;

a slot antenna plate configured to radiate microwaves via the waveguide; and

a dielectric window installed on the processing container side of the slot antenna plate.