MICROWAVE PLASMA PROCESSING APPARATUS, SLOT ANTENNA, AND SEMICONDUCTOR DEVICE
First Claim
1. A microwave plasma processing apparatus comprising:
- a cooling plate;
an intermediate metal body installed on a processing container side of the cooling plate to be spaced apart from the cooling plate so that a spacing between the intermediate metal body and the cooling plate forms a waveguide of microwaves, wherein the intermediate metal body is in contact with the cooling plate at one or plural convex portions arranged to block a portion of the waveguide;
a coaxial waveguide configured to supply microwaves to the waveguide;
a slot antenna plate configured to radiate microwaves via the waveguide;
a dielectric window installed on the processing container side of the slot antenna plate; and
a processing container installed to be sealed by the dielectric window.
1 Assignment
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Accused Products
Abstract
Disclosed is a microwave plasma processing apparatus. The microwave plasma processing apparatus includes a cooling plate. In addition, the microwave plasma processing apparatus includes an intermediate metal body installed on a processing container side of the cooling plate to be spaced apart from the cooling plate so that a spacing between the intermediate metal body and the cooling plate forms a waveguide of microwaves. The intermediate metal body is in contact with the cooling plate at one or plural convex portions arranged to block a portion of the waveguide. Further, the microwave plasma processing apparatus includes a coaxial waveguide configured to supply microwaves to the waveguide, a slot antenna plate configured to radiate microwaves via the waveguide, a dielectric window installed on the processing container side of the slot antenna plate, and a processing container installed to be sealed by the dielectric window.
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Citations
9 Claims
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1. A microwave plasma processing apparatus comprising:
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a cooling plate; an intermediate metal body installed on a processing container side of the cooling plate to be spaced apart from the cooling plate so that a spacing between the intermediate metal body and the cooling plate forms a waveguide of microwaves, wherein the intermediate metal body is in contact with the cooling plate at one or plural convex portions arranged to block a portion of the waveguide; a coaxial waveguide configured to supply microwaves to the waveguide; a slot antenna plate configured to radiate microwaves via the waveguide; a dielectric window installed on the processing container side of the slot antenna plate; and a processing container installed to be sealed by the dielectric window. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8)
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9. A slot antenna comprising:
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a cooling plate; an intermediate metal body installed on a processing container side of the cooling plate to be spaced apart from the cooling plate so that a spacing between the intermediate metal body and the cooling plate forms a waveguide of microwaves, wherein the intermediate metal body is in contact with the cooling plate at one or plural convex portions arranged to block a portion of the waveguide; a coaxial waveguide configured to supply microwaves to the waveguide; a slot antenna plate configured to radiate microwaves via the waveguide; and a dielectric window installed on the processing container side of the slot antenna plate.
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Specification