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MICROWAVE PLASMA PROCESSING APPARATUS, SLOT ANTENNA, AND SEMICONDUCTOR DEVICE

  • US 20150013911A1
  • Filed: 07/09/2014
  • Published: 01/15/2015
  • Est. Priority Date: 07/10/2013
  • Status: Active Grant
First Claim
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1. A microwave plasma processing apparatus comprising:

  • a cooling plate;

    an intermediate metal plate installed on a processing container side of the cooling plate to be spaced apart from the cooling plate, wherein the intermediate metal plate has a donut-shaped convex portion that separates a processing container side surface of the intermediate metal plate into a center side portion and an outer periphery side portion;

    a slot plate installed on the processing container side of the intermediate metal plate to be in contact with the convex portion, wherein, on a processing container side surface of the slot plate, the slot plate includes, as slots for radiating microwaves, a first slot formed in a more center side portion than a portion which is in contact with the convex portion and a second slot formed at a more outer periphery side than a portion which is in contact with the;

    a coaxial waveguide installed in a through hole which is formed in the center side portion in the intermediate metal body to extend continuously through the cooling plate and the intermediate metal plate, wherein the coaxial waveguide includes an inner conductor, an intermediate conductor, and an outer conductor, microwaves are transmitted by each of a space between the inner conductor installed in a hollow portion of the intermediate conductor and the intermediate conductor and a space between the intermediate conductor installed in a hollow portion of the outer conductor and the outer conductor, and a difference between an inner diameter of the outer conductor and an outer diameter of the intermediate conductor is larger than a difference between an outer diameter of the inner conductor and an inner diameter of the intermediate conductor;

    an inner waveguide configured to transmit microwaves to the first slot by transmitting the microwaves in a center side space, which is positioned at a more center side than the convex portion in a space between the slot plate and the intermediate metal body, through the space between the inner conductor and the intermediate conductor;

    an outer waveguide configured to transmit microwaves to the second slot by transmitting the microwaves in an outer periphery side space, which is positioned at a more outer periphery side than the convex portion in the space between the slot plate and the intermediate metal body, through the space between the intermediate conductor, and the outer conductor and the space between the intermediate metal body and the cooling plate in this order;

    a dielectric window installed on the processing container side of the slot plate; and

    a processing container provided to be sealed by the dielectric window.

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