DISPLAY DEVICE AND METHOD FOR MANUFACTURING DISPLAY DEVICE
First Claim
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1. A display device comprising:
- a transistor over a flexible substrate, the transistor comprising an oxide semiconductor film having a light-transmitting property;
a capacitor over the flexible substrate, the capacitor comprising a first electrode, a second electrode, and a dielectric film between the first electrode and the second electrode; and
an insulating film covering the oxide semiconductor film,wherein the capacitor comprises a region where the first electrode and the dielectric film are in contact with each other, andwherein the insulating film does not cover the region.
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Abstract
A highly flexible display device and a method for manufacturing the display device are provided. A transistor including a light-transmitting semiconductor film, a capacitor including a first electrode, a second electrode, and a dielectric film between the first electrode and the second electrode, and a first insulating film covering the semiconductor film are formed over a flexible substrate. The capacitor includes a region where the first electrode and the dielectric film are in contact with each other, and the first insulating film does not cover the region.
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Citations
27 Claims
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1. A display device comprising:
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a transistor over a flexible substrate, the transistor comprising an oxide semiconductor film having a light-transmitting property; a capacitor over the flexible substrate, the capacitor comprising a first electrode, a second electrode, and a dielectric film between the first electrode and the second electrode; and an insulating film covering the oxide semiconductor film, wherein the capacitor comprises a region where the first electrode and the dielectric film are in contact with each other, and wherein the insulating film does not cover the region. - View Dependent Claims (2, 3, 4, 5, 6)
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7. A display device comprising:
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a transistor over a flexible substrate, the transistor comprising an oxide semiconductor film having a light-transmitting property; a capacitor over the flexible substrate, the capacitor comprising a first electrode, a second electrode, and a dielectric film between the first electrode and the second electrode; a light-emitting element over the flexible substrate; and an insulating film covering the oxide semiconductor film, wherein the capacitor comprises a region where the first electrode and the dielectric film are in contact with each other, and wherein the insulating film does not cover the region. - View Dependent Claims (8, 9, 10, 11, 12, 13, 14, 15, 16)
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17. A display device comprising:
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a transistor comprising; a gate electrode over a substrate; a gate insulating film over the gate electrode; an oxide semiconductor film over the gate electrode with the gate insulating film interposed therebetween; a source electrode and a drain electrode in contact with the oxide semiconductor film; and an insulating film over the oxide semiconductor film, the source electrode, and the drain electrode; a capacitor comprising; a first electrode over the substrate, the first electrode having a light-transmitting property and being electrically connected to one of the source electrode and the drain electrode of the transistor; a dielectric film in contact with the first electrode, the dielectric film comprising silicon, nitride, and hydrogen; and a second electrode over the dielectric film; a planarization film over the insulating film and the second electrode, the planarization film having a contact hole; and a pixel electrode over the planarization film and in the contact hole, wherein the insulating film does not overlap with a region where the first electrode and the dielectric film are in contact with each other. - View Dependent Claims (18, 19, 20, 21, 22, 23, 24, 25, 26, 27)
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Specification